Semiconductor devices with output circuit and pad
The present invention has for its purpose to provide a technique capable of reducing planar dimension of the semiconductor device. An input/output circuit is formed over the semiconductor substrate, a grounding wiring and a power supply wiring pass over the input/output circuit, and a conductive layer for a bonding pad is formed thereover. The input/output circuit is formed of MISFET elements in the nMISFET forming region and the pMISFET forming region, resistance elements in the resistance element forming regions and diode elements in the diode element forming regions functioning as protective elements. A wiring connected to the protective elements and positioned under the grounding wiring and the power supply wiring is pulled out in a pulling-out region between the nMISFET forming region and the pMISFET forming region and between the grounding wiring and the power supply wiring to be connected to the conductive layer.
1. A semiconductor device comprising:
a semiconductor substrate having a main surface which has an edge;
a plurality of output circuits disposed in a row along the edge on the main surface, each of the plurality of output circuits including a circuit, a first MISFET, and a second MISFET, wherein a shortest distance between the first MISFET and the edge of the main surface is smaller than a distance between the second MISFET and the edge of the main surface;
a first bonding pad disposed over the main surface, the first bonding pad being overlapped with the first MISFET in a first output circuit of the plurality of output circuits in plan view;
a first wiring disposed under the first bonding pad;
a first conductor plug disposed between the first bonding pad and the first wiring, the first conductor plug connecting the first bonding pad and the first wiring, and the first bonding pad and the first wiring being electrically connected to drain terminals of the first MISFETs and to drain terminals of the second MISFETs in the first output circuit;
a second bonding pad disposed over the main surface, the second bonding pad being overlapped with the second MISFET in a second output circuit of the plurality of output circuits in plan view, the first output circuit and the second output circuit being disposed side by side;
a second wiring disposed under the second bonding pad;
a second conductor plug disposed between the second bonding pad and the second wiring, the second conductor plug connecting the second bonding pad and the second wiring, and the second bonding pad and the second wiring being electrically connected to drain terminals of the first and to drain terminals of the second MISFETs in the second output circuit, wherein a shortest distance between the first bonding pad and the edge of the main surface is smaller than a distance between the second bonding pad and the edge of the main surface;
a first power supply wiring disposed over each circuit of the plurality of output circuits; and
a second power supply wiring disposed over each circuit of the plurality of output circuits,
wherein the first conductor plug is located between the first MISFET and the second MISFET in the first output circuit in plan view,
wherein the second conductor plug is located between the first MISFET and the second MISFET in the second output circuit in plan view,
wherein each circuit of the plurality of output circuits comprises a level shifter and an I/O control circuit,
wherein the first power supply wiring is connected to the first bonding pad, and
wherein the second power supply wiring is connected to the second bonding pad.
2. The semiconductor device according to claim 1 ,
wherein the first MISFET in the first output circuit and the first MISFET in the second output circuit are located side by side, and
wherein the second MISFET in the first output circuit and the second MISFET in the second output circuit are located side by side.
3. The semiconductor device according to claim 1 , wherein the first and second bonding pads form a staggered bonding pad arrangement.
4. The semiconductor device according to claim 1 ,
wherein each of the plurality of output circuits includes a first protection diode and a second protection diode,
wherein the first and second protection diodes in the first output circuit are electrically connected to the first bonding pad,
wherein the first and second protection diodes in the second output circuit are electrically connected to the second bonding pad,
wherein the first conductor plug is located between the first and second protection diodes in the first output circuit in plan view, and
wherein the second conductor plug is located between the first and second protection diodes in the second output circuit in plan view.
5. The semiconductor device according to claim 1 ,
wherein a protective film is disposed over the first and second bonding pads, and
wherein the first and second bonding pads are partially exposed from the protective film.
6. The semiconductor device according to claim 5 , wherein the protective film is overlapped with the first and second conductive plugs in plan view.
7. The semiconductor device according to claim 1 , wherein the first and second MISFETs are a pMISFET and an nMISFET, respectively.
8. The semiconductor device according to claim 1 ,
wherein the first and second bonding pads are comprised of aluminum, and
wherein the first and second wirings are comprised of copper.