Metal structural body-containing polymer film, method for manufacturing metal structural body-containing polymer film, and method for manufacturing patterned structural body
A method for manufacturing a patterned structural body by which a patterned structural body having a micropattern can be manufactured, a metal structural body-containing polymer film that can be used in the manufacture of the patterned structural body, and a method for manufacturing the polymer film are provided. The metal structural body-containing polymer film comprises a polymer film that includes a block copolymer having an ion-conductive segment and a non-ion-conductive segment and has a microphase-separated structure including ion-conductive domains and non-ion-conductive domains, and a metal structural body localized at the ion-conductive domains.
1. A method for manufacturing a patterned structural body, comprising the steps of:
preparing a metal structural body-containing polymer film by:
preparing a polymer film that includes a block copolymer having an ion-conductive segment and a non-ion-conductive segment and has a microphase-separated structure including ion-conductive domains and non-ion-conductive domains; and
forming a metal structural body localized at the ion-conductive domains;
providing the metal structural body-containing polymer film into contact with a base material and producing a composite body including the metal structural body-containing polymer film and the base material; and
etching the base material by using the metal structural body as a mask.
2. The method for manufacturing a patterned structural body according to claim 1 , further comprising a step of removing the polymer film of the metal structural body-containing polymer film between a step of producing the composite body and etching the base material by using the metal structural body as a mask.
3. The method for manufacturing a patterned structural body according to claim 1 , further comprising a step of removing the metal structural body after the step of etching the base material by using the metal structural body as a mask.
4. The method for manufacturing a patterned structural body according to claim 1 , wherein the metal structural body of the metal structural body-containing polymer film and the base material are in contact with each other.
5. The method for manufacturing a patterned structural body according to claim 1 , wherein the ion conductive segment is formed from monomers obtained by adding an ion exchange group to a diene monomer or an olefin monomer, and the non-ion conductive segment is formed from monomers comprising one or more of acrylic acid esters, methacrylic acid esters, styrene, conjugated dienes and vinyl ester compounds.
6. The method for manufacturing a patterned structural body according to claim 1 , wherein the metal structural body comprises at least one of Ni, Ag, Sn, Cu, Zn, Cr, Au, Co and Fe as a main component.
7. The method for manufacturing a patterned structural body according to claim 1 , wherein the microphase-separated structure is a periodic self-organized structure of 1 nm to 5 nm.
8. The method for manufacturing a patterned structural body according to claim 1 , wherein forming the metal structural body localized at the ion-conductive domains comprises plating the metal structural body on the ion-conductive methods by at least one of an electroplating, electroless plating and substitution plating method.
9. The method for manufacturing a patterned structural body according to claim 1 , wherein 80% or more of the metal structural body is present in the ion-conductive domains.