Inkjet print head, method of manufacturing the same and drawing apparatus equipped with the same
Provided are a manufacturing method of an inkjet print head, the inkjet print head and a drawing apparatus equipped with the inkjet print head. The manufacturing method includes: forming a separation assisting layer on a substrate; forming heating resistors, thin-film transistors and nozzles for ejecting liquid, on the separation assisting layer; separating the separation assisting layer from the substrate; forming a first heat-conductive layer on the opposite surface of the separation assisting layer from the nozzles; and forming an ink supply port for supplying ink to the nozzles from a first heat-conductive layer side of the inkjet print head.
1. An inkjet print head, comprising:
a separation assisting layer formed so as to be separated from a substrate put under the separation assisting layer;
heating resistors above the separation assisting layer;
thin-film transistors above the separation assisting layer;
nozzles, for ejecting liquid, above the separation assisting layer;
a first heat-conductive layer on an opposite surface of the separation assisting layer from the nozzles, put in place of the substrate; and
at least one second heat-conductive layer extending between the heating resistors and the separation assisting layer and including regions put below the heating resistors, each of the regions having a greater area than an area of the corresponding heating resistor,
wherein the at least one second heat-conductive layer is one or both of
the second heat-conductive layer extending between a gate insulating film of the thin-film transistors and an undercoat film put under the thin-film transistors, and
the second heat-conductive layer extending between an interlayer insulating film and the gate insulating film, the interlayer insulating film separating gate electrodes of the thin-film transistors and source and drain electrodes of the thin-film transistors.
2. The inkjet print head of claim 1 , wherein the at least one second heat-conductive layer extends up to an end of the inkjet print head and has a part exposed to an outside of the inkjet print head.
3. The inkjet print head of claim 1 , wherein the at least one second heat-conductive layer is formed of a film of a same material as a material of the gate electrodes, or a film of a same material as a material of an active layer of the thin-film transistors.
4. An inkjet print head, comprising:
a separation assisting layer formed so as to be separated from a substrate put under the separation assisting layer;
heating resistors above the separation assisting layer;
thin-film transistors above the separation assisting layer;
nozzles, for ejecting liquid, above the separation assisting layer;
a first heat-conductive layer on an opposite surface of the separation assisting layer from the nozzles, put in place of the substrate;
an undercoat film put on the separation assisting layer; and
at least one second heat-conductive layer that extends between the heating resistors and the undercoat film and includes regions located below the heating resistors.
5. The inkjet print head of claim 4 , wherein an area of the second heat-conductive layer is larger than that of the heating resistors.