IP Library Granted Patent US 9,236,489
Granted Patent B2
US 9,236,489 · App. 13/845,424 · Granted Jan 12, 2016

Logic circuit and semiconductor device

Inventors: Shunpei Yamazaki (Setagaya, JP); Jun Koyama (Sagamihara, JP); Masashi Tsubuku (Atsugi, JP); Kosei Noda (Atsugi, JP)
Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
H01L29/7869H01L27/1225H01L29/78696H01L22/34H01L2924/0002
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Quick Facts
Patent No.
US 9,236,489
App. No.
13/845,424
Granted
Jan 12, 2016
Kind
B2
Abstract

A logic circuit includes a thin film transistor having a channel formation region formed using an oxide semiconductor, and a capacitor having terminals one of which is brought into a floating state by turning off the thin film transistor. The oxide semiconductor has a hydrogen concentration of 5×10 19 (atoms/cm 3 ) or less and thus substantially serves as an insulator in a state where an electric field is not generated. Therefore, off-state current of a thin film transistor can be reduced, leading to suppressing the leakage of electric charge stored in a capacitor, through the thin film transistor. Accordingly, a malfunction of the logic circuit can be prevented. Further, the excessive amount of current which flows in the logic circuit can be reduced through the reduction of off-state current of the thin film transistor, resulting in low power consumption of the logic circuit.

Claims (126)

1. A semiconductor device comprising:

a transistor comprising a first terminal, a second terminal and a gate terminal;

a logic circuit comprising a first output terminal, the first output terminal being electrically connected to the first terminal; and

a capacitor,

wherein the gate terminal is electrically connected to a line,

wherein one terminal of the capacitor is electrically connected to the second terminal and a second output terminal,

wherein a channel formation region of the transistor comprises an oxide semiconductor, and

wherein a carrier density of the oxide semiconductor in the transistor is 5×10 14 /cm 3 or less.

2. The semiconductor device according to claim 1 ,

wherein the logic circuit comprises a second transistor, and

wherein the channel formation region of the second transistor comprises an oxide semiconductor.

3. The semiconductor device according to claim 1 , wherein the other terminal of the capacitor is electrically connected to a low power supply potential line.

4. The semiconductor device according to claim 1 , wherein the oxide semiconductor comprises an In—Ga—Zn—O-based oxide semiconductor.

5. An electronic device comprising the semiconductor device according to claim 1 .

6. The semiconductor device according to claim 1 , wherein hydrogen concentration of the oxide semiconductor is 5×10 19 atoms/cm 3 or less.

7. The semiconductor device according to claim 1 , wherein the oxide semiconductor comprises at least one of indium and gallium.

8. The semiconductor device according to claim 1 , wherein at least a part of the oxide semiconductor in the transistor is in an oxygen-excess state.

9. A semiconductor device comprising:

a transistor comprising a first terminal, a second terminal and a gate terminal;

a register comprising a first output terminal, the first output terminal being electrically connected to the first terminal; and

a capacitor,

wherein the gate terminal is electrically connected to a line,

wherein one terminal of the capacitor is electrically connected to the second terminal and a second output terminal,

wherein a channel formation region of the transistor comprises an oxide semiconductor, and

wherein a carrier density of the oxide semiconductor in the transistor is 5×10 14 /cm 3 or less.

10. The semiconductor device according to claim 9 ,

wherein the register comprises a second transistor, and

wherein the channel formation region of the second transistor comprises an oxide semiconductor.

11. The semiconductor device according to claim 9 , wherein the other terminal of the capacitor is electrically connected to a low power supply potential line.

12. The semiconductor device according to claim 9 , wherein the oxide semiconductor comprises an In—Ga—Zn—O-based oxide semiconductor.

13. An electronic device comprising the semiconductor device according to claim 9 .

14. The semiconductor device according to claim 9 , wherein hydrogen concentration of the oxide semiconductor is 5×10 19 atoms/cm 3 or less.

15. The semiconductor device according to claim 9 , wherein the oxide semiconductor comprises at least one of indium and gallium.

16. The semiconductor device according to claim 9 , wherein at least a part of the oxide semiconductor in the transistor is in an oxygen-excess state.

17. A semiconductor device comprising:

a first transistor comprising a first terminal which is electrically connected to a high power supply potential line;

a second transistor comprising a gate terminal which is electrically connected to an input terminal, and a first terminal which is electrically connected to a gate terminal and a second terminal of the first transistor;

a third transistor comprising a gate terminal which is electrically connected to a pulse signal line, a first terminal which is electrically connected to a second terminal of the second transistor, and a second terminal which is electrically connected to a low power supply potential line;

a fourth transistor comprising a gate terminal which is electrically connected to the pulse signal line, a first terminal which is electrically connected to the gate terminal and the second terminal of the first transistor and the first terminal of the second transistor, and a second terminal which is electrically connected to an output terminal; and

a capacitor,

wherein one terminal of the capacitor is electrically connected to the second terminal of the fourth transistor and the output terminal, and

wherein a channel formation region of the fourth transistor comprises an oxide semiconductor.

18. The semiconductor device according to claim 17 , wherein channel formation regions of the first to third transistors each comprises an oxide semiconductor with a hydrogen concentration of 5×10 19 atoms/cm 3 or less.

19. The semiconductor device according to claim 17 , wherein the oxide semiconductor comprises an In—Ga—Zn—O-based oxide semiconductor.

20. An electronic device comprising the semiconductor device according to claim 17 .

21. The semiconductor device according to claim 17 , wherein hydrogen concentration of the oxide semiconductor is 5×10 19 atoms/cm 3 or less.

22. The semiconductor device according to claim 17 , wherein an off-state current of the fourth transistor is 1×10 −13 [A] or less when a voltage between source and drain of the fourth transistor is 10V.

23. The semiconductor device according to claim 17 , wherein the oxide semiconductor comprises at least one of indium and gallium.

24. The semiconductor device according to claim 17 , wherein a carrier density of the oxide semiconductor in the fourth transistor is 5×10 14 /cm 3 or less.

25. A semiconductor device comprising:

a first transistor comprising a first terminal which is electrically connected to a high power supply potential line;

a second transistor comprising a gate terminal which is electrically connected to a pulse signal line, and a first terminal which is electrically connected to a gate terminal and a second terminal of the first transistor;

a third transistor comprising a gate terminal which is electrically connected to an input terminal, a first terminal which is electrically connected to a second terminal of the second transistor, and a second terminal which is electrically connected to a low power supply potential line;

a fourth transistor comprising a gate terminal which is electrically connected to the pulse signal line, a first terminal which is electrically connected to the second terminal of the second transistor and the first terminal of the third transistor, and a second terminal which is electrically connected to an output terminal; and

a capacitor,

wherein one terminal of the capacitor is electrically connected to the second terminal of the fourth transistor and the output terminal, and

wherein a channel formation region of the fourth transistor comprises an oxide semiconductor.

26. The semiconductor device according to claim 25 , wherein channel formation regions of the first to third transistors each comprises an oxide semiconductor with a hydrogen concentration of 5×10 19 atoms/cm 3 or less.

27. The semiconductor device according to claim 25 , wherein the oxide semiconductor comprises an In—Ga—Zn—O-based oxide semiconductor.

28. An electronic device comprising the semiconductor device according to claim 25 .

29. The semiconductor device according to claim 25 , wherein hydrogen concentration of the oxide semiconductor is 5×10 19 atoms/cm 3 or less.

30. The semiconductor device according to claim 25 , wherein an off-state current of the fourth transistor is 1×10 −13 [A] or less when a voltage between source and drain of the fourth transistor is 10V.

31. The semiconductor device according to claim 25 , wherein the oxide semiconductor comprises at least one of indium and gallium.

32. The semiconductor device according to claim 25 , wherein a carrier density of the oxide semiconductor in the fourth transistor is 5×10 14 /cm 3 or less.

33. A semiconductor device comprising:

a first transistor comprising a gate terminal and a first terminal which are electrically connected to a high power supply potential line;

a second transistor comprising a gate terminal which is electrically connected to an input terminal, and a first terminal which is electrically connected to a second terminal of the first transistor;

a third transistor comprising a gate terminal which is electrically connected to a pulse signal line, a first terminal which is electrically connected to a second terminal of the second transistor, and a second terminal which is electrically connected to a low power supply potential line;

a fourth transistor comprising a gate terminal which is electrically connected to the pulse signal line, a first terminal which is electrically connected to the second terminal of the first transistor and the first terminal of the second transistor, and a second terminal which is electrically connected to an output terminal; and

a capacitor,

wherein one terminal of the capacitor is electrically connected to the second terminal of the fourth transistor and the output terminal, and

wherein a channel formation region of the fourth transistor comprises an oxide semiconductor.

34. The semiconductor device according to claim 33 , wherein channel formation regions of the first to third transistors each comprises an oxide semiconductor with a hydrogen concentration of 5×10 19 atoms/cm 3 or less.

35. The semiconductor device according to claim 33 , wherein the oxide semiconductor comprises an In—Ga—Zn—O-based oxide semiconductor.

36. An electronic device comprising the semiconductor device according to claim 33 .

37. The semiconductor device according to claim 33 , wherein hydrogen concentration of the oxide semiconductor is 5×10 19 atoms/cm 3 or less.

38. The semiconductor device according to claim 33 , wherein an off-state current of the fourth transistor is 1×10 −13 [A] or less when a voltage between source and drain of the fourth transistor is 10V.

39. The semiconductor device according to claim 33 , wherein the oxide semiconductor comprises at least one of indium and gallium.

40. The semiconductor device according to claim 33 , wherein a carrier density of the oxide semiconductor in the fourth transistor is 5×10 14 /cm 3 or less.

41. A semiconductor device comprising:

a first transistor comprising a gate terminal and a first terminal which are electrically connected to a high power supply potential line;

a second transistor comprising a gate terminal which is electrically connected to a pulse signal line, and a first terminal which is electrically connected to a second terminal of the first transistor;

a third transistor comprising a gate terminal which is electrically connected to an input terminal, a first terminal which is electrically connected to a second terminal of the second transistor, and a second terminal which is electrically connected to a low power supply potential line;

a fourth transistor comprising a gate terminal which is electrically connected to the pulse signal line, a first terminal which is electrically connected to the second terminal of the second transistor and the first terminal of the third transistor, and a second terminal which is electrically connected to an output terminal; and

a capacitor,

wherein one terminal of the capacitor is electrically connected to the second terminal of the fourth transistor and the output terminal, and

wherein a channel formation region of the fourth transistor comprises an oxide semiconductor.

42. The semiconductor device according to claim 41 , wherein channel formation regions of the first to third transistors each comprises an oxide semiconductor with a hydrogen concentration of 5×10 19 atoms/cm 3 or less.

43. The semiconductor device according to claim 41 , wherein the oxide semiconductor comprises an In—Ga—Zn—O-based oxide semiconductor.

44. An electronic device comprising the semiconductor device according to claim 41 .

45. The semiconductor device according to claim 41 , wherein hydrogen concentration of the oxide semiconductor is 5×10 19 atoms/cm 3 or less.

46. The semiconductor device according to claim 41 , wherein an off-state current of the fourth transistor is 1×10 −13 [A] or less when a voltage between source and drain of the fourth transistor is 10V.

47. The semiconductor device according to claim 41 , wherein the oxide semiconductor comprises at least one of indium and gallium.

48. The semiconductor device according to claim 41 , wherein a carrier density of the oxide semiconductor in the fourth transistor is 5×10 14 /cm 3 or less.

49. A semiconductor device comprising:

a transistor comprising a first terminal, a second terminal and a gate terminal;

a logic circuit comprising a first output terminal, the first output terminal being electrically connected to the first terminal; and

a capacitor,

wherein the gate terminal is electrically connected to a line,

wherein one terminal of the capacitor is electrically connected to the second terminal and a second output terminal,

wherein a channel formation region of the transistor comprises an oxide semiconductor, and

wherein an off-state current of the transistor is 1×10 13 [A] or less when a voltage between source and drain of the transistor is 10V.

50. The semiconductor device according to claim 49 ,

wherein the logic circuit comprises a second transistor, and

wherein the channel formation region of the second transistor comprises an oxide semiconductor.

51. The semiconductor device according to claim 49 , wherein the other terminal of the capacitor is electrically connected to a low power supply potential line.

52. The semiconductor device according to claim 49 , wherein the oxide semiconductor comprises an In—Ga—Zn—O-based oxide semiconductor.

53. An electronic device comprising the semiconductor device according to claim 49 .

54. The semiconductor device according to claim 49 , wherein hydrogen concentration of the oxide semiconductor is 5×10 19 atoms/cm 3 or less.

55. The semiconductor device according to claim 49 , wherein the oxide semiconductor comprises at least one of indium and gallium.

56. A semiconductor device comprising:

a transistor comprising a first terminal, a second terminal and a gate terminal;

a register comprising a first output terminal, the first output terminal being electrically connected to the first terminal; and

a capacitor,

wherein the gate terminal is electrically connected to a line,

wherein one terminal of the capacitor is electrically connected to the second terminal and a second output terminal,

wherein a channel formation region of the transistor comprises an oxide semiconductor, and

wherein an off-state current of the transistor is 1×10 13 [A] or less when a voltage between source and drain of the transistor is 10V.

57. The semiconductor device according to claim 56 ,

wherein the register comprises a second transistor, and

wherein the channel formation region of the second transistor comprises an oxide semiconductor.

58. The semiconductor device according to claim 56 , wherein the other terminal of the capacitor is electrically connected to a low power supply potential line.

59. The semiconductor device according to claim 56 , wherein the oxide semiconductor comprises an In—Ga—Zn—O-based oxide semiconductor.

60. An electronic device comprising the semiconductor device according to claim 56 .

61. The semiconductor device according to claim 56 , wherein hydrogen concentration of the oxide semiconductor is 5×10 19 atoms/cm 3 or less.

62. The semiconductor device according to claim 56 , wherein the oxide semiconductor comprises at least one of indium and gallium.

Priority Claims (1)
JP 2009-238914 · Oct 16, 2009 · national
Continuity (2)
Continuation 12901057 · Oct 8, 2010
Related Publication 20130200370A1 · Aug 8, 2013