Method for operating CMUTs under high and varying pressure
Capacitive micromachined ultrasonic transducers (CMUTs) in permanent contact mode are provided. Such a CMUT always has its plate in contact with the substrate, even for zero applied electrical bias. This contact is provided by the pressure difference between the environment, and the pressure of the evacuated region between the CMUT plate and substrate. Due to this permanent contact, the electric field in the gap for a given DC bias voltage will be larger, which provides improved coupling efficiency at lower DC bias voltages. Furthermore, in an environment with high and varying pressure, the plate will not shift between the conventional mode and the collapsed mode, but will only be pushed down with varying contact radius. In some embodiments, an electrode shaped as an annulus is employed, so that only the active vibrating part of the CMUT plate sees the applied DC and AC voltages.
1. A capacitive micromachined ultrasonic transducer (CMUT) comprising:
a substrate;
a CMUT plate disposed above the substrate, wherein a sealed cavity between the substrate and the CMUT plate is substantially evacuated;
wherein the CMUT is configured to operate at an external gas pressure of about 1 atmosphere or more;
wherein the CMUT plate makes partial contact with the substrate when no external bias voltage is applied to the CMUT due to the external gas pressure;
wherein a contact between the CMUT plate and the substrate is configured to have a contact radius that varies with applied pressure;
wherein the CMUT is configured such that an active part of the CMUT plate vibrates at an operating frequency of the CMUT during operation of the CMUT;
wherein at least one electrode of the CMUT is configured as an annulus surrounding a contact zone where the CMUT plate makes contact with the substrate;
wherein the annulus surrounds an electrically floating region of the CMUT, whereby an electric field in the contact zone is decreased.
2. The CMUT of claim 1 , wherein the external gas pressure can vary in a range from about 1 atmosphere to about 20 atmospheres.
3. The CMUT of claim 1 , wherein the operating frequency of the CMUT is about 300 kHz or less.