Electrostatic chuck, mount plate support, and manufacturing method of electrostatic chuck
According to one embodiment, an electrostatic chuck comprises a mount plate, a first layer, and a second layer. The first layer includes a heater. The second layer is provided between the mount plate and the first layer. The second layer transmits heat from the heater to the mount plate. The second layer includes a compressive attachment portion. The compressive attachment portion is formed at the outer edge. The face on the mount plate side of the compressive attachment portion is compressed and attached to the mount plate. The face on the first layer side of the compressive attachment portion is compressed and attached to the first layer.
1. An electrostatic chuck comprising:
a mount plate on which a work is to be mounted;
a first layer including a heater to supply heat to the work via the mount plate; and
a second layer provided between the mount plate and the first layer to transmit heat from the heater to the mount plate, wherein
the second layer includes a compressive attachment portion formed at an outer edge thereof,
the compressive attachment portion is formed of a metal member,
a face on the mount plate side of the compressive attachment portion is compressed and attached to the mount plate, and
a face on the first layer side of the compressive attachment portion is compressed and attached to the first layer.
2. The electrostatic chuck according to claim 1 , wherein
the second layer includes a metal plate, and
the compressive attachment portion is part of the metal plate.
3. The electrostatic chuck according to claim 1 , wherein
the first layer includes a heat insulating layer provided at an outer edge, and
the face on the first layer side of the compressive attachment portion is compressed and attached to the heat insulating layer.
4. The electrostatic chuck according to claim 1 , wherein
the second layer includes a metal plate, a first adhesive portion that bonds the metal plate and the mount plate together, and a second adhesive portion that bonds the metal plate and the first layer together,
a surface on the mount plate side of the second layer is formed of exposed parts of the metal plate and the first adhesive portion, and
a surface on the first layer side of the second layer is formed of exposed parts of the metal plate and the second adhesive portion.
5. The electrostatic chuck according to claim 4 , wherein
the surface on the mount plate side of the second layer is formed of the first adhesive portion and exposed parts of the metal plate so as to form a pattern, and
the surface on the first layer side of the second layer is formed of the second adhesive portion and exposed parts of the metal plate so as to form a pattern.
6. The electrostatic chuck according to claim 5 , wherein
the heater is placed to form a pattern in the first layer, and
the pattern of the exposed parts of the metal plate in the surface on the first layer side of the second layer coincides with the pattern of the heater.
7. The electrostatic chuck according to claim 5 , wherein
in a surface of the mount plate on which the work is to be mounted, a plurality of convexes to be in contact with the work mounted and concaves that are other parts of the convexes are formed, and
the pattern of the exposed parts of the metal plate in the surface on the mount plate side of the second layer coincides with a pattern of the concaves formed in the mount plate.
8. The electrostatic chuck according to claim 1 , wherein
the second layer includes a metal plate, a first adhesive portion that bonds the metal plate and the mount plate together, a second adhesive portion that bonds the metal plate and the first layer together, and soft metal members provided in a surface on the mount plate side and a surface on the first layer side of the metal plate,
a surface on the mount plate side of the second layer is formed of the first adhesive portion and the soft metal members so as to form a pattern, and
a surface on the first layer side of the second layer is formed of the second adhesive portion and the soft metal members so as to form a pattern.
9. A mount plate support of an electrostatic chuck which includes a mount plate on which a work is to be mounted, the mount plate support supporting the mount plate, the mount plate support comprising:
a first layer including a heater to supply heat to the work via the mount plate; and
a second layer provided over the first layer, wherein
the second layer includes a compressive attachment portion formed at an outer edge thereof,
the compressive attachment portion is formed of a metal member,
a face on the first layer side of the compressive attachment portion is compressed and attached to the first layer, and
a face of the compressive attachment portion opposite to the first layer side is a compressive attachment surface for the mount plate to be fixed onto the second layer.
10. The mount plate support according to claim 9 , wherein
the second layer includes a metal plate, and
the compressive attachment portion is part of the metal plate.
11. The mount plate support according to claim 9 , wherein
the first layer includes a heat insulating layer provided at an outer edge, and
the face on the first layer side of the compressive attachment portion is compressed and attached to the heat insulating layer.
12. The mount plate support according to claim 9 , wherein
the second layer includes a metal plate, a first adhesive portion that bonds the metal plate and the mount plate together, and a second adhesive portion that bonds the metal plate and the first layer together,
a surface on the mount plate side of the second layer is formed of exposed parts of the metal plate and the first adhesive portion, and
a surface on the first layer side of the second layer is formed of exposed parts of the metal plate and the second adhesive portion.
13. The mount plate support according to claim 12 , wherein
the surface on the mount plate side of the second layer is formed of the first adhesive portion and exposed parts of the metal plate so as to form a pattern, and
the surface on the first layer side of the second layer is formed of the second adhesive portion and exposed parts of the metal plate so as to form a pattern.
14. A manufacturing method of an electrostatic chuck comprising:
bonding a second layer to a first layer including a heater; and
bonding a mount plate on which a work is to be mounted to a surface opposite to a surface of the second layer bonded to the first layer, wherein
the second layer is prepared such that, of its outer edge, part to abut on the first layer and part to abut on the mount plate are both a protrusion and that the second layer is thicker at the outer edge than at the other part than the outer edge,
when the second layer is bonded to the first layer and the mount plate is to the second layer, the outer edge of the second layer is compressed and attached to the first layer by pressing the protrusion against the first layer to deform, and the outer edge of the second layer is compressed and attached to the mount plate by pressing the protrusion against the mount plate to deform.
15. The manufacturing method of the electrostatic chuck according to claim 14 , wherein
the outer edge of the second layer is formed of a metal member,
the outer edge of the second layer is compressed and attached to the first layer by pressing the protrusion formed of the metal member against the first layer to deform, and
the outer edge of the second layer is compressed and attached to the mount plate by pressing the protrusion formed of the metal member against the mount plate to deform.
16. The manufacturing method of the electrostatic chuck according to claim 14 , wherein
the outer edge of the second layer is part of a metal plate included in the second layer,
the outer edge of the second layer is compressed and attached to the first layer by pressing the protrusion that is part of the metal plate against the first layer to deform, and
the outer edge of the second layer is compressed and attached to the mount plate by pressing the protrusion that is part of the metal plate against the mount plate to deform.
17. The manufacturing method of the electrostatic chuck according to claim 14 , wherein
a flow passage to fill an adhesive bond into is formed in the surface on the mount plate side of the second layer, and
the adhesive bond is made to flow into the flow passage, thereby bonding the second layer and the mount plate together.
18. The manufacturing method of the electrostatic chuck according to claim 14 , wherein
a flow passage to fill an adhesive bond into is formed in the surface on the first layer side of the second layer, and
the adhesive bond is made to flow into the flow passage, thereby bonding the second layer and the first layer together.