Manufacturing method for semiconductor device with discrete field oxide structure
A manufacturing method for a semiconductor device with a discrete field oxide structure is provided, the method includes: growing a first PAD oxide layer on the surface of a wafer; forming a first silicon nitride layer ( 302 ) on the first PAD oxide layer through deposition; defining a field region by photolithography and etching same to remove the first silicon nitride layer ( 302 ) located on the field region; performing an ion implantation process to the field region; performing field region oxidation to grow a field oxide layer ( 304 ); peeling off the first silicon nitride layer ( 302 ); wet-dipping the wafer to remove the first PAD oxide layer and a part of field oxide layer ( 304 ); growing a second PAD oxide layer on the surface of the wafer, and forming a second silicon nitride layer ( 312 ) on the second PAD oxide layer through deposition; defining a drift region by photolithography and etching same to remove the second silicon nitride layer ( 312 ) on the drift region; performing an ion implantation process to the drift region; and performing drift region oxidation to grow a drift region oxide layer ( 314 ). The above-mentioned method peels off the silicon nitride layer ( 302 ) after the growth of the field oxide layer ( 304 ) is finished, at this time, the length of a bird beak of field-oxide ( 304 ) can be optimized by adjusting a wet-dipping amount to solve the problem that the bird beak of field-oxide ( 304 ) is too long.
1. A manufacturing method for a semiconductor device having a discrete field oxide structure, comprising:
growing a first PAD oxide layer on a surface of a wafer;
forming a first silicon nitride layer on the first PAD oxide layer through deposition;
defining a field region by photolithography and etching the field region to remove the first silicon nitride layer located on the field region;
performing an ion implantation process to the field region;
performing an oxidation process to the field region to grow a field oxide layer;
peeling off the first silicon nitride layer;
wet-dipping the wafer to remove the first PAD oxide layer and a part of the field oxide layer to reduce a length of a bird beak of the field oxide layer;
growing a second PAD oxide layer on the surface of the wafer, forming a second silicon nitride layer on the second PAD oxide layer through deposition, the second silicon nitride layer fully covering the field oxide layer;
defining a drift region by photolithography and etching the drift region to remove the second silicon nitride layer located on the drift region;
performing an ion implantation process to the drift region; and
performing an oxidation process to the drift region to grow a drift region oxide layer.
2. The method according to claim 1 , wherein the step of defining a field region by photolithography and etching the field region comprises: coating photoresist and defining the field region through exposure and development, removing the first silicon nitride layer on the field region by performing a plasma etching process, removing the photoresist and cleaning the wafer, the step of removing the photoresist and cleaning the wafer is executed prior to the step of performing an oxidation process to the field region.
3. The method according to claim 1 , wherein the step of defining a drift region by photolithography and etching the drift region comprises: coating photoresist and defining the drift region through exposure and development, removing the second silicon nitride layer on the drift region by performing a plasma etching process, removing the photoresist and cleaning the wafer, the step of removing the photoresist and cleaning the wafer is executed prior to the step of performing an oxidation process to the drift region.
4. The method according to claim 1 , wherein the step of forming a first silicon nitride layer and a second silicon nitride layer through deposition is performed through a low pressure furnace.
5. The method according to claim 1 , wherein after the step of performing an oxidation process to the drift region to grow a drift region oxide layer, the method further comprises peeling off the second silicon nitride layer.
6. The method according to claim 1 , wherein in the step of peeling off the first silicon nitride layer, the first silicon nitride layer is peeled off through a phosphoric acid solution.
7. The method according to claim 1 , wherein thicknesses of the first PAD oxide layer and the second PAD oxide layer are both 150 angstroms.
8. The method according to claim 7 , wherein in the step of wet-dipping the wafer to remove the first PAD oxide layer and a part of the field oxide layer, a thickness of the removed field oxide layer is 200 angstroms.
9. The method according to claim 8 , wherein in the step of performing an oxidation process to the field region to grow a field oxide layer, a thickness of the grown field oxide layer is 6000 angstroms.
10. The method according to claim 8 , wherein in the step of performing an oxidation process to the drift region to grow a drift region oxide layer, a thickness of the grown drift region oxide layer is 3000 angstroms.
11. The method according to claim 1 , wherein the semiconductor device is a laterally diffused metal oxide semiconductor FET.