Apparatus and method for developing process
View Patent ↗An apparatus includes at least two tanks, at least two pumps, at least one nozzle, and a chuck. The apparatus provides multiple developers with different polarities during a developing process to target portions of a latent resist profile having different polarities, and thus different solubility. This apparatus also allows a mixture of two developers to be used for the resist film developing. A polarity of the mixture is adjustable by controlling a ratio of one pump flow rate to another pump flow rate and further controlling the resist pattern profile.
1. A method for forming a resist pattern, the method
comprising:
depositing a resist film on a substrate, wherein the resist film has a top surface and a bottom surface;
exposing, through a mask, the resist film deposited on the substrate to form a non-uniformly exposed latent resist profile within the resist film by light at least partially scattering at the top surface or the bottom surface, wherein the non-uniformly exposed latent resist profile includes a first portion of a first polarity and a second portion of a second polarity, wherein the first polarity is different from the second polarity; and
patterning a resist profile in the exposed resist film using a plurality of developers, the patterning including:
applying a first developer of the plurality of developers with the first polarity to the exposed resist film, wherein the first developer develops the first portion of the non-uniformly exposed latent resist profile; and
applying a second developer of the plurality of developers with the second polarity to the exposed resist film, and wherein the second developer develops the second portion of the non-uniformly exposed latent resist profile.
2. The method of claim 1 , wherein the second polarity is smaller than the first polarity.
3. The method of claim 1 , wherein the first portion includes a top portion of the non-uniformly exposed latent resist profile.
4. The method of claim 3 , wherein the second portion includes a middle portion of the non-uniformly exposed latent resist profile.
5. The method of claim 1 , further including simultaneously applying the first developer and the second developer to the exposed resist film.
6. The method of claim 1 , wherein the patterning further includes applying a third developer of the plurality of developers with a third polarity to the exposed resist film, wherein the third polarity is different than the first polarity and the second polarity.
7. The method of claim 6 , wherein the third polarity is greater that the first polarity.
8. The method of claim 6 , further comprising:
simultaneously applying the first developer and the second developer to the exposed resist film; and
thereafter, applying the third developer to the exposed resist film.
9. A method for forming a resist pattern, the method comprising:
depositing a resist film on a substrate, wherein the resist film has a top surface and a bottom surface;
exposing, through a mask, the resist film deposited on the substrate to form a non-uniformly exposed latent resist profile within the resist film by light at least partially scattering at the top surface or the bottom surface, wherein the non-uniformly exposed latent resist profile includes a first portion exposed to a first energy dose and a second portion exposed to a second energy dose different than the first energy dose; and
patterning a resist profile in the exposed resist film using a plurality of organic solvent developers, the patterning including:
distributing a first organic solvent developer of the plurality of organic solvent developers with a first polarity on the exposed resist film, wherein the first organic solvent developer develops the first portion of the non-uniformly exposed latent resist profile;
distributing a second organic solvent developer of the plurality of organic solvent developers with a second polarity on the exposed resist film, wherein the second polarity is different than the first polarity, and wherein the second organic solvent developer develops the second portion of the non-uniformly exposed latent resist profile; and
distributing a third organic solvent developer of the plurality of organic solvent developers with a third polarity on the non-uniformly exposed latent resist profile, wherein the third polarity is different than the first polarity and the second polarity.
10. The method of claim 9 , further including distributing simultaneously the first organic solvent developer and the second organic solvent developer to the exposed resist film.
11. The method of claim 9 , further comprising distributing the first organic solvent developer and the second organic solvent developer using a first nozzle of a developing apparatus and distributing the third organic solvent developer using a second nozzle of the developing apparatus.
12. The method of claim 9 , wherein the distributing the third organic solvent developer with the third polarity on the exposed resist film includes removing a bottom resist scum via the distributed third organic solvent developer.
13. The method of claim 9 , further comprising performing a post exposure bake process before distributing the first organic solvent developer.
14. The method of claim 9 , further comprising performing a post develop bake process after distributing the first organic solvent developer, the second organic solvent developer, and the third organic solvent developer.
15. A method for forming a resist pattern on a substrate, the method comprising:
depositing a resist film on the substrate, wherein the resist film has a top surface and a bottom surface;
exposing, through a mask, the resist film deposited on the substrate to form a non-uniformly exposed latent resist profile within the resist film, wherein the non-uniformly exposed latent resist profile includes a first portion exposed to a first energy dose provided by light at least partially scattering at the top surface or the bottom surface, and a second portion exposed to a second energy dose different than the first energy dose;
delivering a first developer of a first polarity through a nozzle;
delivering a second developer of a second polarity through the nozzle, the second polarity being different than the first polarity;
wherein the nozzle distributes the first developer and the second developer to the exposed resist film on the substrate.
16. The method of claim 15 , further comprising:
delivering a third developer of a third polarity through the nozzle, the third polarity being different than the first polarity and the second polarity;
wherein the nozzle is further configured to distribute the third developer to the exposed resist film on the substrate.
17. The method of claim 15 , wherein delivering the first developer with the first polarity includes applying a developer for developing the first portion of the exposed resist film.
18. The method of claim 15 , wherein the delivering the second developer with the second polarity includes applying a developer for developing the second portion of the exposed resist film.
19. The method of claim 15 , further including simultaneously applying the first developer and the second developer to the exposed resist film.