Tilt structure
A tilt structure includes a shaft section formed on a substrate section, a tilt structure film having one end formed on an upper surface of the shaft section, and the other end bonded to the substrate section, and a thin film section provided to the tilt structure film, located on a corner section composed of the upper surface of the shaft section and a side surface of the shaft section, and having a film thickness thinner than the tilt structure film, the tilt structure film is bent in the thin film section, and an acute angle is formed by the substrate section and the tilt structure film.
1. A tilt structure, comprising:
a first section disposed on a substrate; and
a first film, of which one end is connected to the first section and the other end is connected to the substrate;
the first film being provided with a second section and a third section that is more easily bent than the second section;
the first film being bent at the third section;
an acute angle being formed by the substrate and the first film; and
a thickness of the third section being thinner than that of the second section.
2. The tilt structure according to claim 1 ,
the third section being disposed on a corner section that is constituted by an upper surface of the first section and a side surface of the first section.
3. A spectral filter that limits a wavelength of light, using the tilt structure according to claim 1 .
4. A tilt structure, comprising:
a first section disposed on a substrate; and
a first film, of which one end is connected to the first section and the other end is connected to the substrate or to a fourth section facing the first section disposed on the substrate;
the first section being more easily bent than the first film;
the first section being bent;
an acute angle being formed by i) the substrate or the fourth section and ii) the first film; and
a width of the first section being smaller than a thickness or a width of the first film.
5. A spectral filter, comprising:
an angle control filter that controls an incident angle of light passing;
the spectral filter according to claim 4 that limits a wavelength of light that can pass through the angle control filter; and
a light receiving element that detects light that passes through the angle control filter and the spectral filter.