Display device and manufacturing method thereof
A display device includes: a first substrate; a photo transistor on the first substrate; and a switching transistor connected to the photo transistor. The photo transistor includes a light blocking film on the first substrate, a first gate electrode on the light blocking film and in contact with the light blocking film, a first semiconductor layer on the first gate electrode and overlapping the light blocking film, and a first source electrode and a first drain electrode on the first semiconductor layer. The switching transistor includes a second gate electrode on the first substrate, a second semiconductor layer on the second gate electrode and overlapping the second gate electrode, and a second source electrode and a second drain electrode on the second semiconductor layer. The first semiconductor layer and the second semiconductor layer are at a same layer of the display device, and each includes crystalline silicon germanium.
1. A display device comprising:
a first substrate;
a photo transistor which is disposed on the first substrate and operated by light; and
a switching transistor connected to the photo transistor,
wherein
the photo transistor comprises:
a light blocking film on the first substrate,
a first gate electrode on the light blocking film and contacting the light blocking film,
a first semiconductor layer comprising crystalline silicon germanium, on the first gate electrode and overlapping the light blocking film, the crystalline silicon germanium first semiconductor layer defining a channel of the photo transistor, and
a first source electrode and a first drain electrode on the crystalline silicon germanium first semiconductor layer,
the switching transistor comprises:
a second gate electrode on the first substrate,
a second semiconductor layer comprising crystalline silicon germanium, on the second gate electrode and overlapping the second gate electrode, the crystalline silicon germanium second semiconductor layer defining a channel of the switching transistor, and
a second source electrode and a second drain electrode on the crystalline silicon germanium second semiconductor layer, and
the crystalline silicon germanium first semiconductor layer of the channel of the photo transistor is disposed between the first substrate, and each of the first source electrode and first drain electrode, respectively, and the crystalline silicon germanium second semiconductor layer of the channel of the switching transistor is disposed between the first substrate, and each of the second source electrode and second drain electrode, respectively.
2. The display device of claim 1 , further comprising:
a power line connected to the first gate electrode,
wherein the power line is formed from a same layer as the first gate electrode.
3. The display device of claim 2 , further comprising:
a unitary drain electrode member of which a first portion thereof defines the first drain electrode and a second portion thereof defines the second drain electrode.
4. The display device of claim 3 , further comprising:
a gate line connected to the second gate electrode.
5. The display device of claim 4 , wherein:
the power line is formed from a same layer as the gate line.
6. The display device of claim 5 , wherein:
the power line applies a negative bias voltage to the first gate electrode.
7. The display device of claim 1 , further comprising:
a light blocking member on the photo transistor.
8. The display device of claim 7 , wherein:
the light blocking member overlaps the crystalline silicon germanium first semiconductor layer.
9. The display device of claim 8 , wherein:
the light blocking member has infrared ray transmittance equal to or less than about 0.1%, and optical density equal to or higher than about 4.
10. The display device of claim 1 , further comprising:
a source signal line connected to the first source electrode.
11. The display device of claim 10 , further comprising:
a read out signal line connected to the second source electrode.
12. The display device of claim 1 , further comprising:
a second substrate facing the first substrate; and
a pixel transistor on the second substrate.
13. The display device of claim 1 , wherein:
the first gate electrode overlaps the first drain electrode and forms a maintenance capacitor configured to accumulate a leakage current generated in the crystalline silicon germanium first semiconductor layer.