Flat panel display device with oxide thin film transistor and method of fabricating the same
A flat panel display device with an oxide thin film transistor is disclosed which includes: an oxide semiconductor layer which has a width of a first length and is formed on a buffer film; a gate insulation film which has a width of a second length and is formed on the oxide semiconductor layer; a gate electrode which has a width of a third length and is formed on the gate insulation film; an interlayer insulation film formed on the entire surface of the substrate provided with the gate electrode; source and drain electrodes formed on the interlayer insulation film and connected to the oxide semiconductor layer; a pixel electrode formed on a passivation film and connected to the drain electrode. The first length is larger than the second length and the second length is larger than the third length.
1. A flat panel display device with an oxide thin film transistor, the device comprising:
a buffer film on a substrate;
an oxide semiconductor layer of the oxide thin film transistor which has a width of a first length and is disposed on the buffer film, the oxide semiconductor layer having a source region and a drain region;
a gate insulation film of the oxide thin film transistor which has a width of a second length and is disposed on the oxide semiconductor layer, the gate insulation film having a first end over the source region and a second end over the drain region, and the gate insulation film having a top surface parallel with and facing away from the substrate;
a gate electrode of the oxide thin film transistor which has a width of a third length and is disposed on the gate insulation film, wherein a portion of the top surface of the gate insulation film extends away from the gate electrode;
an interlayer insulation film on the gate electrode over an entire surface of the substrate;
source and drain electrodes disposed on the interlayer insulation film and connected to the oxide semiconductor layer, the source electrode separated from the first end of the gate insulation film by the interlayer insulation film, and the drain electrode separated from the second end of the gate insulation film by the interlayer insulation film;
a passivation film on the source and drain electrodes over the entire surface of the substrate; and
a pixel electrode disposed on the passivation film and connected to the drain electrode,
wherein the first length is larger than the second length and the second length is larger than the third length.
2. The flat panel display device of claim 1 , wherein the oxide semiconductor layer includes a channel region, and wherein the gate electrode overlaps with the channel region.
3. The flat panel display device of claim 1 , wherein the gate electrode comprises at least one of molybdenum (Mo), aluminum (Al), copper (Cu) and an alloy of molybdenum-titanium (MoTi).
4. The flat panel display device of claim 1 , wherein the gate insulation film comprises a material selected from a material group consisting of silicon oxide (SiO 2 ), silicon nitride (SiNx) and silicon oxynitride (SiON).
5. The flat panel display device of claim 1 , wherein the oxide semiconductor layer comprises a material selected from a material group consisting of amorphous-indium-gallium-zinc-oxide (a-IGZO), amorphous-indium-tin-zinc-oxide (a-ITZO) and indium-gallium-oxide (IGO).