Oxide semiconductor device and manufacturing method therof
A semiconductor device includes a gate electrode; a gate insulating film over the gate electrode; an oxide semiconductor film in contact with the gate insulating film and including a channel formation region which overlaps with the gate electrode; a source electrode and a drain electrode over the oxide semiconductor film; and an oxide insulating film over the oxide semiconductor film, the source electrode, and the drain electrode. The source electrode and the drain electrode each include a first metal film having an end portion at the end of the channel formation region, a second metal film over the first metal film and containing copper, and a third metal film over the second metal film. The second metal film is formed on the inner side than the end portion of the first metal film.
1. A semiconductor device comprising:
a gate electrode;
a gate insulating film over the gate electrode;
an oxide semiconductor film in contact with the gate insulating film, the oxide semiconductor film including a channel formation region overlapping with the gate electrode; and
a source electrode and a drain electrode over the oxide semiconductor film; and
an insulating layer over the source electrode and the drain electrode,
wherein the source electrode and the drain electrode each include a first metal film, a second metal film over the first metal film and containing copper, and a third metal film over the second metal film, and
wherein an end portion of the second metal film is offset from end portions of the first metal film and the third metal film from a center of the channel formation region.
2. The semiconductor device according to claim 1 , wherein a thickness of the oxide semiconductor film in the channel formation region is smaller than a thickness of the oxide semiconductor film in a region in contact with the first metal film.
3. The semiconductor device according to claim 1 , wherein the end portion of the second metal film on a channel formation region side is located in a position not overlapping with the oxide semiconductor film.
4. The semiconductor device according to claim 1 , further comprising an oxide insulating film over the oxide semiconductor film, the source electrode, and the drain electrode.
5. The semiconductor device according to claim 1 , further comprising a protective film covering the end portion of the second metal film on a channel formation region side.
6. The semiconductor device according to claim 1 , wherein at least one of the first metal film and the third metal film comprises a metal or a metal nitride containing one or more elements selected from the group consisting of tungsten, tantalum, titanium, and molybdenum.
7. The semiconductor device according to claim 1 , wherein the oxide semiconductor film is a film containing at least one oxide selected from the group consisting of indium oxide, zinc oxide, gallium oxide, and tin oxide.
8. The semiconductor device according to claim 1 , wherein the oxide semiconductor film is an In—Ga—Zn-based oxide semiconductor film.
9. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor film includes a crystal part, and
wherein the crystal part includes a c-axis which is aligned in a direction parallel to a normal vector of a surface where the oxide semiconductor film is located.