IP Library Granted Patent US 9,401,206
Granted Patent B2
US 9,401,206 · App. 14/680,268 · Granted Jul 26, 2016

Semiconductor memory having both volatile and non-volatile functionality comprising resistive change material and method of operating

Inventor: Yuniarto Widjaja (San Jose, CA)
Assignee: Zeno Semiconductor, Inc.
G11C14/0045G11C11/21G11C11/404G11C11/4072G11C13/00G11C13/0004G11C13/0007G11C13/0069G11C14/00G11C14/009G11C14/0027G11C14/0036H01L27/10802H01L27/2436H01L29/7841H01L45/00G11C2013/0073H01L27/1085H01L27/10879H01L45/04H01L45/06H01L45/1233H01L45/144H01L45/146H01L45/147
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Quick Facts
Patent No.
US 9,401,206
App. No.
14/680,268
Granted
Jul 26, 2016
Kind
B2
Abstract

A semiconductor memory cell including a capacitorless transistor having a floating body configured to store data as charge therein when power is applied to the cell, and a non-volatile memory including a bipolar resistive change element, and methods of operating.

Claims (45)

1. A semiconductor memory array comprising:

a plurality of memory cells arranged in a matrix of rows and columns, wherein at least two of said memory cells each include:

a capacitorless transistor having a floating body configured to store data as charge therein when power is applied to said memory cell; and

a nonvolatile memory comprising a bipolar resistive change element configured to store data stored in said floating body upon transfer thereto;

wherein said floating body has a first conductivity type selected from n-type conductivity type and p-type conductivity type;

said memory cell further comprising first and second regions at first and second locations of said memory cell, said first and second regions each having a second conductivity type selected from said n-type conductivity type and said p-type conductivity type and being different from said first conductivity type;

wherein said transfer is performed to said at least two of said memory cells in parallel.

2. The semiconductor memory array of claim 1 , wherein said resistance change element comprises a material selected from at least one of: transition metal oxide materials, ferroelectric materials and ferromagnetic materials.

3. The semiconductor memory array of claim 1 , wherein said bipolar resistive change element is electrically connected to said capacitorless transistor and a distance between said bipolar resistive change element and said capacitorless transistor, when electrically connected, is in the range from about 90 nm to 1 μm.

4. The semiconductor memory array of claim 1 , wherein said bipolar resistive change element comprises an electrode and a bipolar resistive change material electrically connected to one of said first and second regions.

5. The semiconductor memory array of claim 4 , wherein said bipolar resistive change element is electrically connected to said one of said first and second regions via a conductive element.

6. The semiconductor memory array of claim 4 , further comprising an addressable line electrically connected to said bipolar resistive change element.

7. The semiconductor memory array of claim 6 , wherein said bipolar resistive change element further comprises a conductive material element interconnecting said addressable line and said bipolar resistive change material.

8. The semiconductor memory array of claim 1 , further comprising:

a substrate being made of a material having said second conductivity type; and

a buried layer in said substrate below said first and second regions, spaced apart from said first and second regions and having said second conductivity type;

wherein said floating body of each said memory cell is formed between said first and second regions and said buried layer; and

wherein said non-volatile memory is electrically connected to one of said first and second regions.

9. The semiconductor memory array of claim 1 , further comprising:

a substrate being made of a material having said second conductivity type;

a well in said substrate, said well having said first conductivity type; and

a buried layer located between said well and said first and second regions, spaced apart from said first and second regions and having said second conductivity type;

wherein said floating body of each said memory cell is formed between said first and second regions and said buried layer;

and wherein said non-volatile memory is electrically connected to one of said first and second regions.

10. An integrated circuit comprising:

a plurality of memory cells arranged in a matrix of rows and columns, wherein at least two of said memory cells each include:

a capacitorless transistor having a floating body configured to store data as charge therein when power is applied to said memory cell; and

a nonvolatile memory comprising a bipolar resistive change element configured to store data stored in said floating body upon transfer thereto;

wherein said floating body has a first conductivity type selected from n-type conductivity type and p-type conductivity type;

said memory cell further comprising first and second regions at first and second locations of said cell, said first and second regions each having a second conductivity type selected from said n-type conductivity type and said p-type conductivity type and being different from said first conductivity type; and

a circuitry to perform said transfer.

11. The integrated circuit of claim 10 , wherein said transfer is performed to said at least two of said memory cells in parallel.

12. The semiconductor memory array of claim 10 , wherein said resistance change element comprises a material selected from at least one of: transition metal oxide materials, ferroelectric materials and ferromagnetic materials.

13. The semiconductor memory array of claim 10 , wherein said bipolar resistive change element is electrically connected to said capacitorless transistor and a distance between said bipolar resistive change element and said capacitorless transistor, when electrically connected, is in the range of from about 90 nm to 1 μm.

14. The semiconductor memory array of claim 10 , wherein said bipolar resistive change element comprises an electrode and a bipolar resistive change material electrically connected to one of said first and second regions.

15. A semiconductor memory cell comprising:

a bipolar device configured to store data when power is applied to said cell; and

a nonvolatile memory comprising a bipolar resistive change element configured to store data stored in said bipolar device upon transfer thereto.

16. The semiconductor memory cell of claim 15 , wherein said bipolar resistive change element comprises a material selected from at least one of: transition metal oxide materials, ferroelectric materials and ferromagnetic materials.

17. The semiconductor memory cell of claim 15 , wherein said bipolar resistive change element is electrically connected to said bipolar device and a distance between said bipolar resistive change element and said bipolar device, when electrically connected, is in the range of from about 90 nm to 1 μm.

18. The semiconductor memory cell of claim 15 , wherein said bipolar device comprises a floating body region having a first conductivity type selected from n-type conductivity type and p-type conductivity type;

said memory cell further comprising first and second regions at first and second locations of said memory cell, said first and second regions each having a second conductivity type selected from said n-type conductivity type and said p-type conductivity type and being different from said first conductivity type; and

wherein said bipolar resistive change element comprises an electrode and a bipolar resistive change material electrically connected to one of said first and second regions.

19. The semiconductor memory cell of claim 18 , wherein said bipolar resistive change element is electrically connected to said one of said first and second regions via a conductive element.

20. The semiconductor memory cell of claim 15 , further comprising an addressable line electrically connected to said bipolar resistive change element.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 7, 2015
From: WIDJAJA, YUNIARTO
To: ZENO SEMICONDUCTOR, INC.
Reel/Frame 036015/0253 →
Continuity (4)
Continuation 13652457 · Oct 15, 2012
Provisional Application 61546571 · Oct 13, 2011
Provisional Application 61547734 · Oct 16, 2011
Related Publication 20150213892A1 · Jul 30, 2015