High-temperature isotropic plasma etching process to prevent electrical shorts
A method includes placing a device having a titanium nitride layer into a chamber. The device also has a mask that includes a photoresist material and an aluminum copper hardmask. The method also includes performing an ashing process on the mask using the chamber. The method further includes, after the ashing process, performing an etching process using the chamber to etch through portions of the titanium nitride layer. Performing the etching process includes flowing a gas mixture containing tetrafluoromethane (CF 4 ) and oxygen gas (O 2 ) into the chamber at a temperature of at least about 200° C.
1. A method comprising:
placing a device, comprising a titanium layer formed on a titanium nitride layer, into a chamber, the device having a mask comprising a photoresist material and an aluminum copper hardmask;
performing an ashing process on the mask using the chamber; and
after the ashing process, performing an etching process using the chamber to etch through the titanium layer and the titanium nitride layer exposed by the aluminum copper hardmask;
wherein performing the etching process comprises flowing a gas mixture containing tetrafluoromethane (CF 4 ) and oxygen gas (O 2 ) into the chamber at a temperature of at least about 200° C.
2. The method of claim 1 , wherein the gas mixture has a ratio of about 4:1 tetrafluoromethane to oxygen gas.
3. The method of claim 1 , wherein:
flowing the gas mixture comprises flowing the tetrafluoromethane at a rate of about 100 standard cubic centimeters per minute (sccm) to about 200 sccm and flowing the oxygen gas at a rate of about 40 sccm to about 60 sccm; and
the etching process occurs within the chamber at a pressure of about 600 meter-ton (mt) to about 1000 mt with a radio frequency (RF) power of about 450 W to about 600 W.
4. The method of claim 3 , wherein:
the tetrafluoromethane is flowed at a rate of about 190 sccm;
the oxygen gas is flowed at a rate of about 50 sccm; and
the RF power is about 500 W.
5. The method of claim 1 , wherein performing the ashing process comprises performing the ashing process at a pressure of about 1200 meter-ton (mt) with an oxygen gas flow rate of about 900 standard cubic centimeters per minute (sccm) and a radio frequency (RF) power of about 1100 W.
6. The method of claim 1 , further comprising:
after the etching process, performing a chamber seasoning process within the chamber.
7. The method of claim 6 , wherein performing the chamber seasoning process comprises performing the chamber seasoning process at a pressure of about 1200 meter-ton (mt) with an oxygen gas flow rate of about 900 standard cubic centimeters per minute (sccm) and a radio frequency (RF) power of about 1100 W.
8. The method of claim 1 , wherein the etching process removes substantially all of the titanium nitride layer that is not masked by the aluminum copper hardmask.
9. The method of claim 1 , wherein:
the etching process etches through a portion of the titanium layer between the titanium nitride layer and the aluminum copper hardmask; and
the aluminum copper hardmask, remaining portions of the titanium layer, and remaining portions of the titanium nitride layer form an electrical contact.