Logic finFET high-K/conductive gate embedded multiple time programmable flash memory
A method for fabricating a multiple time programmable (MTP) device includes forming fins of a first conducting type on a substrate of a second conducting type. The method further includes forming a floating gate dielectric to partially surround the fins. The method also includes forming a floating gate on the floating gate dielectric. The method also includes forming a coupling film on the floating gate and forming a coupling gate on the coupling film.
1. A multiple time programmable (MTP) device, comprising:
a substrate including a shallow trench isolation (STI) layer;
a fin having a first wall, a second wall, and a surface connecting the first wall and the second wall, the first wall and the second wall adjoining the STI layer of
the substrate;
a floating gate dielectric having a first dielectric surface on the first wall of the fin, a second dielectric surface on the surface of the fin, and a third dielectric surface on the second wall of the fin;
a dielectric spacer on the first dielectric surface and the second dielectric surface of the floating gate dielectric;
a floating gate on the floating gate dielectric and the dielectric spacer;
a coupling film in which an entire length of the coupling film is on an entire length of the floating gate; and
a coupling gate on the entire length of the coupling film and at least a portion of the coupling gate directly coupled to the STI layer of the substrate.
2. The MTP device of claim 1 , in which the floating gate is directly coupled to the floating gate dielectric on the second dielectric surface.
3. The MTP device of claim 1 , in which the coupling film and coupling gate partially surround the floating gate.
4. The MTP device of claim 1 , in which the floating gate comprises an input/output (I/O) device and, the floating gate dielectric comprises a thickness-adjustable oxide.
5. The MTP device of claim 1 , in which the floating gate dielectric has a dielectric constant greater than a dielectric constant of silicon oxide.
6. The MTP device of claim 1 , further comprising an erase dielectric coupled to the floating gate.
7. The MTP device of claim 1 , integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.