IP Library Granted Patent US 9,416,044
Granted Patent B2
US 9,416,044 · App. 14/431,525 · Granted Aug 16, 2016

Hydrogen-supported fluorination of soot bodies

Inventors: Martin Trommer (Bitterfeld, DE); Malte Schwerin (Halle/Saale, DE); Stephan Grimm (Jena, DE); Frank Froehlich (Jena, DE); Johannes Kirchhof (Jena, DE)
Assignee: Heraeus Quarzglas GmbH & Co. KG
C03B37/018C03B19/1461C03B23/047C03B37/01446C03B37/027C03C3/04C03C3/06C03B2201/12C03C2201/12C03C2203/46C03C2203/54
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Quick Facts
Patent No.
US 9,416,044
App. No.
14/431,525
Granted
Aug 16, 2016
Kind
B2
Abstract

The invention relates to a method for fluorinating a soot body. The method involves: a) providing a soot body, and b) treating the soot body with a gas mixture containing hydrogen and C n F 2n+2 (n=1 or 2) at a temperature in the range of (1,280-n*250)° C. to (1,220-n*100)° C.

Claims (38)

1. A method for fluorinating a soot body, comprising the steps of

a) providing a soot body, and

b) treating the soot body with a gas mixture comprising hydrogen and C n F 2n+2 , wherein n=1 or 2, at a fluorination temperature in a range of (1,280-n*250)° C. to (1,220-n*100)° C., wherein the gas mixture contains 35 to 95 vol. % nitrogen based on a total volume of the gas mixture at 25° C.

2. The method according to claim 1 , comprising treating the soot body with a gas mixture comprising CF 4 and hydrogen at a temperature range of 1,050 to 1,120° C.

3. The method according to claim 1 , comprising treating the soot body with a gas mixture comprising C 2 F 6 and hydrogen at a temperature range of 750 to 1,000° C.

4. The method according to claim 1 , wherein the gas mixture contains up to 65 vol. % C n F 2n+2 and hydrogen, each based on a total volume of the gas mixture at 25° C.

5. The method according to claim 1 , wherein the gas mixture contains 10 to 60 vol. % C 2 F 6 or CF 4 , each based on a total volume of the gas mixture at 25° C.

6. The method according to claim 1 , wherein the soot body is a porous SiO 2 soot body having a mean density of 0.48 g/cm 3 to 0.77 g/cm 3 and a specific surface area of more than 5 m 2 /g.

7. A fluorinated soot body obtained by the method according to claim 1 .

8. A method for producing a synthetic glass for an optical element comprising the steps of:

i) producing or providing a soot body;

ii) fluorinating the soot body according to claim 1 ;

iii) optionally chlorinating the fluorinated soot body; and

iv) vitrifying the fluorinated soot body at a pressure of less than 0.1 bar at a temperature above the fluorination temperature.

9. The method according to claim 8 , wherein the soot body is produced by depositing SiO 2 particles for mass deposition on a substrate that rotates about its longitudinal axis using at least one depositing burner.

10. The method according to claim 8 , wherein the synthetic glass is a glass tube.

11. A glass obtained by the method according to claim 8 .

12. An optical element produced by the method according to claim 8 .

13. A method of producing an optical fiber from the glass according to claim 11 , comprising elongating the glass while forming a substrate tube and coating the glass on an internal wall of the substrate tube.

14. A method for fluorinating a soot body, comprising the steps of

a) providing a soot body, and

b) treating the soot body with a gas mixture comprising hydrogen and C n F 2n+2 , wherein n=1 or 2, at a fluorination temperature in a range of (1,280-n*250)° C. to (1,220-n*100)° C., wherein the gas mixture contains hydrogen in an amount of up to 15 vol. % based on a total volume of the gas mixture at 25° C.

15. The method according to claim 14 , comprising treating the soot body with a gas mixture comprising CF 4 and hydrogen at a temperature range of 1,050 to 1,120° C.

16. The method according to claim 14 , comprising treating the soot body with a gas mixture comprising C 2 F 6 and hydrogen at a temperature range of 750 to 1,000° C.

17. The method according to claim 14 , wherein the gas mixture contains up to 65 vol. % C n F 2n+2 and hydrogen, each based on a total volume of the gas mixture at 25° C.

18. The method according to claim 14 , wherein the gas mixture contains 10 to 60 vol. % C 2 F 6 or CF 4 , each based on a total volume of the gas mixture at 25° C.

19. The method according to claim 14 , wherein the soot body is a porous SiO 2 soot body having a mean density of 0.48 g/cm 3 to 0.77 g/cm 3 and a specific surface area of more than 5 m 2 /g.

20. A fluorinated soot body obtained by the method according to claim 14 .

21. A method for producing a synthetic glass for an optical element comprising the steps of:

i) producing or providing a soot body;

ii) fluorinating the soot body according to claim 14 ;

iii) optionally chlorinating the fluorinated soot body; and

iv) vitrifying the fluorinated soot body at a pressure of less than 0.1 bar at a temperature above the fluorination temperature.

22. The method according to claim 21 , wherein the soot body is produced by depositing SiO 2 particles for mass deposition on a substrate that rotates about its longitudinal axis using at least one depositing burner.

23. The method according to claim 21 , wherein the synthetic glass is a glass tube.

24. A glass obtained by the method according to claim 21 .

25. An optical element produced by the method according to claim 21 .

26. A method of producing an optical fiber from the glass according to claim 24 , comprising elongating the glass while forming a substrate tube and coating the glass on an internal wall of the substrate tube.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 27, 2016
From: TROMMER, MARTIN; SCHWERIN, MALTE; GRIMM, STEPHAN; FROEHLICH, FRANK; KIRCHHOF, JOHANNES
To: HERAEUS QUARZGLAS GMBH & CO. KG
Reel/Frame 037592/0621 →
Priority Claims (1)
EP 12006738 · Sep 27, 2012 · regional
Continuity (1)
Related Publication 20150259238A1 · Sep 17, 2015