Peeling apparatus and stack manufacturing apparatus
The yield of a peeling process is improved. A peeling apparatus includes a structure body with a convex surface and a stage with a supporting surface which faces the convex surface. The structure body can hold a first member of a process member between the convex surface and the supporting surface. The stage can hold a second member of the process member. The radius of curvature of the convex surface is less than the radius of curvature of the supporting surface. The linear velocity of the convex surface is greater than or equal to the speed of a rotation center of the structure body passing the stage. The first member is wound along the convex surface to be separated from the second member.
1. A peeling apparatus comprising:
a stage configured to hold a process member including a first member and a second member;
a roller over the stage;
a guide having a groove, wherein the guide extends in a movement direction of the roller; and
a liquid feeding unit configured to feed liquid to an opening portion of the first member,
wherein the groove supports a rotation axis of the roller, and
wherein the roller rotates and moves along the groove so that the first member is separated from the second member and rolled up by the roller.
2. The peeling apparatus according to claim 1 ,
wherein the stage does not move when the roller moves.
3. The peeling apparatus according to claim 1 , wherein a distance between a curved surface of the roller and one surface of the stage is controlled by a position where the groove is provided in the guide.
4. The peeling apparatus according to claim 1 , wherein an adhesive tape is attached to at least part of a surface of the roller.
5. The peeling apparatus according to claim 1 , wherein the roller has a suction unit so that at least part of a surface of the roller is attached to the first member.
6. The peeling apparatus according to claim 1 , wherein the first member and the second member are separated from each other while tension is applied to the process member.
7. The peeling apparatus according to claim 1 , wherein the whole first member is rolled up by the roller before the roller rotates a half turn.
8. The peeling apparatus according to claim 1 , wherein the liquid is pure water.
9. The peeling apparatus according to claim 1 ,
wherein the first member comprises at least a peeled layer, and
wherein the second member comprises at least a separation layer.
10. A peeling apparatus comprising:
a stage configured to hold a process member including a first member and a second member;
a roller over the stage;
a guide having a groove, wherein the guide extends in a movement direction of the roller; and
a liquid feeding unit configured to feed liquid to an opening portion of the first member,
wherein the groove supports a rotation axis of the roller,
wherein the roller rotates and moves along the groove so that the first member is separated from the second member and rolled up by the roller, and
wherein the radius of curvature of the roller is greater than or equal to 100 mm and less than or equal to 500 mm.
11. The peeling apparatus according to claim 10 ,
wherein the stage does not move when the roller moves.
12. The peeling apparatus according to claim 10 , wherein a distance between a curved surface of the roller and one surface of the stage is controlled by a position where the groove is provided in the guide.
13. The peeling apparatus according to claim 10 , wherein an adhesive tape is attached to at least part of a surface of the roller.
14. The peeling apparatus according to claim 10 , wherein the roller has a suction unit so that at least part of a surface of the roller is attached to the first member.
15. The peeling apparatus according to claim 10 , wherein the first member and the second member are separated from each other while tension is applied to the process member.
16. The peeling apparatus according to claim 10 , wherein the whole first member is rolled up by the roller before the roller rotates a half turn.
17. The peeling apparatus according to claim 10 , wherein the liquid is pure water.
18. The peeling apparatus according to claim 10 ,
wherein the first member comprises at least a peeled layer, and
wherein the second member comprises at least a separation layer.