Member for semiconductor manufacturing apparatus
A member for a semiconductor manufacturing apparatus includes an electrostatic chuck, a cooling unit, a spacer (an O-ring, an outer periphery spacer, or the like) for securing a gap placed between the electrostatic chuck and the cooling unit, and a clamp ring placed on the upper surface of the outer periphery of the electrostatic chuck. The clamp ring is fastened to the cooling unit with screws. The screws are inserted into coil springs that prevent loosening, and are fastened to nuts. The coil springs are attached not to the clamp ring side but to the cooling unit side.
1. A member for a semiconductor manufacturing apparatus, including:
an electrostatic chuck, a cooling unit, a spacer for securing a gap placed between the electrostatic chuck and the cooling unit, and an insulating spacer interposed between a clamp ring and an upper surface of the outer periphery of the electrostatic chuck, the electrostatic chuck and the cooling unit are fixed to each other by fastening the clamp ring to the cooling unit with screws,
wherein the screws are inserted into coil springs that prevent loosening, and are tightened such that a space having a vertical clearance and no direct contact between the clamp ring and the cooling unit is formed, and,
the coil springs are attached not to the clamp ring side but to the cooling unit side.
2. The member for a semiconductor manufacturing apparatus according to claim 1 , wherein the screw feet of the screws pass through the clamp ring and the cooling unit from the clamp ring side, and after the screw feet pass through the cooling unit, nuts are screwed on the screw feet, with the coil springs therebetween.
3. The member for a semiconductor manufacturing apparatus according claim 1 , wherein heat-transfer gas is supplied to the gap.
4. The member for a semiconductor manufacturing apparatus according to claim 1 , wherein a dot-like outer periphery spacer is placed at a position where a gap outer peripheral part of the gap along the outer periphery of the electrostatic chuck intersects with a radial direction from the center of the electrostatic chuck toward the screw.
5. The member for a semiconductor manufacturing apparatus according to claim 4 , wherein the dot-like outer periphery spacer is integrated with a spacer support that is formed in a ring-like shape so as to protrude outwardly from the gap.
6. The member for a semiconductor manufacturing apparatus according to claim 1 , wherein a ring-like outer periphery spacer is placed in a gap outer peripheral part of the gap along the outer periphery of the electrostatic chuck.
7. The member for a semiconductor manufacturing apparatus according claim 6 , wherein the outer periphery spacer is made of polyimide resin.
8. The member for a semiconductor manufacturing apparatus according claim 4 , wherein the outer periphery spacer is made of polyimide resin.