Multichip power semiconductor device
An electronic device includes a first chip carrier and a second chip carrier isolated from the first chip carrier. A first power semiconductor chip is mounted on and electrically connected to the first chip carrier. A second power semiconductor chip is mounted on and electrically connected to the second chip carrier. An electrically insulating material is configured to at least partially surround the first power semiconductor chip and the second power semiconductor chip. An electrical interconnect is configured to electrically connect the first power semiconductor chip to the second power semiconductor chip, wherein the electrical interconnect has at least one of a contact clip and a galvanically deposited conductor.
1. A method of manufacturing an electronic device, the method comprising:
providing a first chip carrier;
providing a second chip carrier, wherein the second chip carrier is isolated from the first chip carrier;
mounting a first power semiconductor chip on the first chip carrier, thereby electrically connecting the first power semiconductor chip to the first chip carrier;
mounting a second power semiconductor chip on the second chip carrier, thereby electrically connecting the second power semiconductor chip to the second chip carrier;
forming an electrically insulating material configured to at least partially surround the first power semiconductor chip and the second power semiconductor chip; and
after forming the electrically insulating material, applying an electrical interconnect configured to electrically connect the first power semiconductor chip to the second power semiconductor chip, wherein applying the electrical interconnect comprises:
forming a first via in the electrically insulating material, the first via exposes a portion of the second chip carrier; and
filling the first via by using galvanic deposition.
2. The method of claim 1 , wherein forming the electrical interconnect comprises:
forming a second via in the electrically insulating material, the second via exposes a portion of a first contact pad arranged on a top main face of the first power semiconductor chip; and
filling the second via by using the galvanic deposition.
3. A method of manufacturing an electronic device, the method comprising:
providing a first chip carrier;
providing a second chip carrier, wherein the second chip carrier is isolated from the first chip carrier;
mounting a first power semiconductor chip on the first chip carrier, thereby electrically connecting the first power semiconductor chip to the first chip carrier;
mounting a second power semiconductor chip on the second chip carrier, thereby electrically connecting the second power semiconductor chip to the second chip carrier;
forming an electrically insulating material configured to at least partially surround the first power semiconductor chip and the second power semiconductor chip; and
after forming the electrically insulating material, applying an electrical interconnect configured to electrically connect the first power semiconductor chip to the second power semiconductor chip, wherein applying the electrical interconnect comprises:
forming a via in the electrically insulating material, the via exposing a portion of a first contact pad arranged on a top main face of the first power semiconductor chip; and
filling the via by galvanic deposition.