Large-area probe card and method of manufacturing the same
A large-area probe card and method of manufacturing the same including an insulation plate including at least one contactor formed thereon, a main substrate disposed below the insulation plate, and a flexible signal connector vertically passing through the insulation plate and disposed between the at least one contactor and the main substrate to electrically connect the at least one contactor with the main substrate.
1. A large-area probe card comprising:
an insulation plate including at least one contactor;
a main substrate disposed below the insulation plate; and
a flexible signal connector vertically passing through the insulation plate and disposed between the at least one contactor and the main substrate to electrically connect the at least one contactor with the main substrate,
wherein the signal connector comprises:
a slit vertically formed in the insulation plate; and
a flexible circuit board fitted in the slit, one end of which is electrically connected to the at least one contactor and the other end of which is electrically connected to the main substrate.
2. The large-area probe card according to claim 1 , wherein the insulation plate comprises a ceramic substrate.
3. The large-area probe card according to claim 1 , wherein the flexible circuit board serves as a space transformer compensating for the difference between a pitch of the at least one contactor and a pitch of pads of the main substrate.
4. The large-area probe card according to claim 1 , wherein the insulation plate includes a contactor mounting region and an edge region surrounding the contactor mounting region and constituting a periphery of the insulation plate, and
wherein the slit is formed on the contactor mounting region.
5. The large-area probe card according to claim 1 , wherein the slit is arranged along the circumference and a length of the at least one contactor and has a predetermined length along the length of the at least one contactor.
6. The large-area probe card according to claim 5 , wherein the at least one contactor is provided in plural number, and the slit is formed for each of the plural number of contactors.
7. The large-area probe card according to claim 6 , wherein the slit is provided in plural number, and the plural number of slits are formed in a width direction with spacings therebetween.
8. The large-area probe card according to claim 6 , wherein the slit has a width of 2 mm to 3 mm and a length corresponding to a total length of one to three contactors.