Interconnect structure for package-on-package devices and a method of fabricating
An interconnect structure and a method of forming an interconnect structure are provided. The interconnect structure is formed over a carrier substrate, upon which a die may also be attached. Upon removal of the carrier substrate and singulation, a first package is formed. A second package may be attached to the first package, wherein the second package may be electrically coupled to through vias formed in the first package.
1. A method of forming a semiconductor device, the method comprising:
forming a seed layer over a carrier substrate;
forming a protective layer over the seed layer, the protective layer having openings;
forming through vias extending from the seed layer, the through vias extending through the openings of the protective layer;
attaching a die to the protective layer;
forming a molding compound between the through vias and the die;
electrically coupling electrical connectors to the through vias and electrical contacts on the die;
debonding the carrier substrate and exposing the seed layer; and
after the debonding, removing the seed layer to expose the through vias.
2. The method of claim 1 , wherein the forming the protective layer and forming the through vias comprises:
forming a first layer over the seed layer;
forming a patterned mask over the first layer, the patterned mask having openings formed therein to expose portions of the first layer;
forming openings in the first layer, thereby forming the protective layer;
filling the openings in the patterned mask and the protective layer with a conductive material, thereby forming the through vias; and
removing the patterned mask.
3. The method of claim 1 , wherein the forming the molding compound comprises forming the molding compound over the die, wherein the through vias extend higher from the seed layer than the die, and further comprising, after the forming the molding compound, thinning the molding compound to expose electrical contacts on the die and thinning the through vias.
4. The method of claim 3 , further comprising forming one or more redistribution layers over the molding compound.
5. The method of claim 1 , further comprising, after the debonding:
singulating to form a first package; and
attaching a second package to the first package, the second package being electrically coupled to the through vias in the first package.
6. The method of claim 5 , further comprising forming an underfill between the first package and the second package.
7. The method of claim 1 , further comprising, before the debonding, attaching the electrical connectors to another carrier substrate.
8. The method of claim 1 , wherein the protective layer has a thickness from 1 μm to 40 μm.
9. A method of forming a semiconductor device, the method comprising:
forming a protective layer over a carrier substrate, the protective layer having an opening;
after forming the protective layer, forming a through via in the opening of the protective layer;
attaching a die to the protective layer, the protective layer interposed between the die and the carrier substrate;
after attaching the die, forming a molding compound between the through via and the die;
electrically coupling electrical connectors to the through via and electrical contacts on the die; and
after the electrically coupling, debonding the carrier substrate.
10. The method of claim 9 , further comprising forming a seed layer over the carrier substrate, wherein the protective layer is formed over the seed layer.
11. The method of claim 9 , wherein the electrically coupling comprises forming one or more redistribution layers over the molding compound.
12. The method of claim 9 , further comprising planarizing the molding compound.
13. The method of claim 9 , wherein the protective layer has a thickness from 1 μm to 40 μm.
14. The method of claim 9 , after the debonding, attaching a solder joint directly to the through via.
15. A semiconductor device comprising:
a first package comprising:
an integrated circuit die, the integrated circuit die having an active side and a backside, the active side having electrical contacts;
a molding compound adjacent sidewalls of the integrated circuit die;
a protective layer over the integrated circuit die and the molding compound, the backside of the integrated circuit die being interposed between the active side and the protective layer, the protective layer having a first side and a second side opposite the first side, the first side of the protective layer being in direct contact with the molding compound; and
through vias extending through the molding compound and the protective layer, the through vias comprising a single continuous element extending through the molding compound and the protective layer, a surface of the through vias being level with the second side of the protective layer.
16. The semiconductor device of claim 15 , further comprising a second package mounted over the first package, the second package being electrically coupled to the through vias.
17. The semiconductor device of claim 16 , wherein the first package is electrically coupled to the second package using solder joints directly coupled to the through vias.
18. The semiconductor device of claim 15 , further comprising one or more redistribution layers (RDLs) adjacent the molding compound, the molding compound being interposed between the protective layer and the RDLs.
19. The semiconductor device of claim 15 , further comprising a die-attach film interposed between the integrated circuit die and the protective layer.
20. The semiconductor device of claim 15 , wherein the active side of the integrated circuit die is level with a surface of the molding compound.