Detection device comprising an improved cold finger
The detection device comprises a cold finger which performs the thermal connection between a detector and a cooling system. The cold finger comprises at least one side wall at least partially formed by an area made from the amorphous metal alloy. Advantageously, the whole of the cold finger is made from the amorphous metal alloy.
1. A detection device comprising:
a readout circuit formed in a first semiconductor substrate,
a detection circuit hybridized on a first main surface of the readout circuit,
a cooling system thermally connected to the detection circuit and to the readout circuit,
a cold finger configured to enable cooling of the readout circuit by the cooling system,
wherein the cold finger comprises at least one side wall defining a confinement channel of a cooling gas originating from the cooling system, said at least one side wall being at least partially formed by an area made from amorphous metal alloy so as to form a thermal insulator, and
wherein the amorphous metal alloy is selected from the group consisting of Zirconium/Aluminium/Nickel/Copper alloys, Zirconium/Titanium/Copper/Nickel/Beryllium alloys, Iron/Nickel/Phosphorus/Boron alloys, Iron/Boron alloys, Iron/Nickel/Chromium/Phosphorus/Boron alloys, Palladium/Nickel/Copper/Phosphorus alloys, Palladium/Nickel/Phosphorous alloys, Iron/Cobalt/Yttrium/Boron alloys, and Cobalt/Nickel/Iron/Silicon/Boron alloys.
2. The detection device according to claim 1 , wherein the area made from amorphous metal alloy forms a ring.
3. The detection device according to claim 2 , wherein the at least one side wall is completely formed by an amorphous metal alloy.
4. The detection device according to claim 3 , wherein the cold finger comprises a top formed from crystalline metal and connected to the readout circuit.
5. The detection device according to claim 1 , wherein the amorphous metal alloy is selected from the group consisting of Zr 55 Al 10 Ni 5 Cu 30 alloys, Zr 41 Ti 14 Cu 12 Ni 10 Be 23 alloys, Fe 80 B 20 alloys, Fe 40 Ni 40 P 14 B 6 and Fe 32 Ni 36 Cr 14 P 12 B 6 alloys, Pd 40 Ni 10 Cu 30 P 20 alloys, Pd 40 Ni 40 P 20 alloys, Fe 42 /Co 30 /Y 6 /B 22 or Fe 43 /C 4.5 /Cr 16.5 /Mo 16.5 /C 14 /B 4 /Y 1.5 or (Fe 43 /Cr 5 /Co 5 /Mo 12.5 /Mn 11.2 /C 15.8 /B 5.9 ) 98.15 /Y 1.5 alloys, and Co 58 Ni 10 Fe 5 Si 11 B 16 alloys.