Solid-state imaging device, manufacturing method of solid-state imaging device, and electronic device
The present technology relates to a solid-state imaging device, manufacturing method of a solid-state imaging device, and an electronic device, which can provide a solid-state imaging device having further improved features such as reduced optical color mixing and the like. Also, an electronic device using the solid-state imaging device thereof is provided. According to a solid-state imaging device having a substrate 12 and multiple photoelectric converters 40 that are formed on the substrate 12 , an insulating film 21 forms an embedded element separating unit 19 . The element separating unit 19 is configured of an insulating film 20 having a fixed charge that is formed so as to coat the inner wall face of a groove portion 30 , within the groove portion 30 which is formed in the depth direction from the light input side of the substrate 12.
1. A solid-state imaging device comprising:
a substrate;
first and second photoelectric converters included in the substrate;
a groove portion disposed between and laterally separating the first and second photoelectric converters in a depth direction in the substrate; and
an element separating unit provided in the groove portion and formed such that a portion of the element separating unit contacts a well layer at a side opposite from a light-input side of the substrate, the element separating unit including an insulating film having a fixed charge and coating a portion of a semiconductive, inwardly facing inner wall face of the groove portion, the portion of the semiconductive, inwardly facing inner wall face extending in a depth direction of the groove portion, the element separating unit contacting a laterally central portion of the well layer along a surface of the well layer, the surface of the well layer substantially extending parallel to a main light input side surface of the substrate.
2. The solid-state imaging device according to claim 1 , wherein the element separating unit is formed in a grid shape so as to surround each photoelectric converter.
3. The solid-state imaging device according to claim 1 , wherein a light-blocking layer is further formed within the groove portion.
4. The solid-state imaging device according to claim 1 , wherein a pixel transistor on a front face side of the substrate is formed on the well layer.
5. The solid-state imaging device according to claim 1 , wherein a portion of the element separating unit is configured to pass through the substrate.
6. The solid-state imaging device according to claim 1 , wherein the portion of the element separating unit is configured to pass through the substrate, and wherein a light-blocking layer passes through the substrate and is connected to a wiring layer formed on a front face side of the substrate.
7. The solid-state imaging device according to claim 1 , wherein a light-blocking layer is formed on a back face side of the substrate, and is electrically connected to a light-blocking film configured to block light in an interface region between adjacent photoelectric converters.
8. The solid-state imaging device according to claim 1 , wherein the insulating film having the fixed charge is formed within the groove portion while being formed to coat a back face of the substrate.
9. A method of manufacturing an imaging device, comprising:
forming first and second photoelectric converters in a substrate;
forming a groove portion disposed laterally between the first and second photoelectric converters and extending in a depth direction in the substrate; and
forming an element separating unit in the groove portion, the element separating unit including an insulating film having a fixed charge, the insulating film coating a portion of a semiconductive, inwardly facing inner wall face of the groove portion, the portion of the semiconductive, inwardly facing inner wall face extending in a depth direction of the groove portion, the insulating film contacting a laterally central portion of a well layer along a surface of the well layer that is substantially extended parallel to a main light-input-side surface of said substrate.
10. The method of manufacturing according to claim 9 , wherein the element separating unit is formed in a grid shape so as to surround each photoelectric converter.