Fluorocarbon molecules for high aspect ratio oxide etch
Etching gases are disclosed for plasma etching channel holes, gate trenches, staircase contacts, capacitor holes, contact holes, etc., in Si-containing layers on a substrate and plasma etching methods of using the same. The etching gases are trans-1,1,1,4,4,4-hexafluoro-2-butene; cis-1,1,1,4,4,4-hexafluoro-2-butene; hexafluoroisobutene; hexafluorocyclobutane (trans-1,1,2,2,3,4); pentafluorocyclobutane (1,1,2,2,3-); tetrafluorocyclobutane (1,1,2,2-); or hexafluorocyclobutane (cis-1,1,2,2,3,4). The etching gases may provide improved selectivity between the Si-containing layers and mask material, less damage to channel region, a straight vertical profile, and reduced bowing in pattern high aspect ratio structures.
1. A method for etching silicon-containing films, the method comprising,
introducing an etching gas into a plasma reaction chamber containing a silicon-containing film on a substrate, wherein the etching gas is selected from the group consisting of trans-1,1,1,4,4,4-hexafluoro-2-butene; cis-1,1,1,4,4,4-hexafluoro-2-butene; hexafluoroisobutene (CAS No. 382-10-5); pentafluorocyclobutane (1,1,2,2,3-); and tetrafluorocyclobutane (1,1,2,2-);
introducing an inert gas into the plasma reaction chamber; and
activating a plasma to produce an activated etching gas capable of selectively etching the silicon-containing film from the substrate.
2. The method of claim 1 , further comprising removing volatile by-products from the chamber, wherein the activated etching gas selectively reacts with the silicon-containing film to form volatile by-products.
3. The method of claim 1 , wherein the inert gas is selected from the group consisting of He, Ar, Xe, Kr, and Ne.
4. The method of claim 1 , wherein the inert gas comprises approximately 50% v/v to approximately 95% v/v of a total volume of etching gas and inert gas introduced into the plasma reaction chamber.
5. The method of claim 1 , further comprising introducing an oxidizer into the plasma reaction chamber.
6. The method of claim 5 , wherein the oxidizer is selected from the group consisting of O 2 , CO, CO 2 , NO, N 2 O, and NO 2 .
7. The method of claim 5 , wherein the oxidizer comprises approximately 5% v/v to approximately 100% v/v of a total volume of etching gas and oxidizer introduced into the plasma reaction chamber.
8. The method of claim 5 , wherein the etching gas is trans-1,1,1,4,4,4-hexafluoro-2-butene.
9. The method of claim 5 , wherein the etching gas is hexafluoroisobutene.
10. The method of claim 1 , wherein the silicon-containing film comprises a layer of silicon oxide, silicon nitride, polysilicon, or combinations thereof.
11. The method of claim 10 , wherein the silicon-containing film is selectively etched from an amorphous carbon layer.
12. The method of claim 10 , wherein the silicon-containing film is selectively etched from a photoresist layer.
13. The method of claim 10 , wherein the silicon-containing film is selectively etched from a polysilicon layer.
14. The method of claim 10 , wherein the silicon-containing film is selectively etched from a metal contact layer.
15. The method of claim 1 , wherein the method produces an aperture in the silicon-containing film having an aspect ratio between approximately 10:1 and approximately 100:1.
16. The method of claim 1 , further comprising improving selectivity by introducing a second gas into the plasma reaction chamber, wherein the second gas is selected from the group consisting of cC 4 F 8 , C 4 F 6 , CF 4 , CHF 3 , CFH 3 , CH 2 F 2 , COS, CS 2 , CF 3 I, C 2 F 3 I, C 2 F 5 I, and SO 2 .
17. The method of claim 1 , wherein the etching gas is trans-1,1,1,4,4,4-hexafluoro-2-butene.
18. The method of claim 1 , wherein the etching gas is hexafluoroisobutene.
19. A method for etching a silicon oxide film from an amorphous carbon substrate, the method comprising,
introducing a trans-1,1,1,4,4,4-hexafluoro-2-butene etch gas into a plasma reaction chamber containing the silicon oxide film on the amorphous carbon substrate;
introducing an inert gas into the plasma reaction chamber; and
etching the silicon oxide film from the amorphous carbon substrate by activating a plasma.
20. A method for etching silicon oxide and silicon nitride films from a substrate, the method comprising,
introducing a hexafluoroisobutene etch gas into a plasma reaction chamber containing the silicon oxide and silicon nitride films on the substrate;
introducing an inert gas into the plasma reaction chamber; and
etching the silicon oxide and silicon nitride films from the substrate by activating a plasma.