Method and apparatus for single chamber treatment
View Patent ↗The disclosure relates to using a single chamber for multiple treatments resulting in a semiconductor chip having an interconnect. An exemplary process many include forming a via to expose several layers of a microchip. The layers may include, pattered dielectric layer, a capping layer, a first metal layer and an insulator. A surface modification step is then implemented to modify and/or densify the treated surfaces of the dielectric surface. A metal compound removal step is then implemented to remove metal compounds from the bottom of the via. Finally, the via is filled with a conductive material. The surface modification and the metal compound removal steps are implemented in one chamber.
1. A process for forming a microchip stack having one or more interconnects, the process comprising:
forming an insulator layer having a cavity therein;
forming a first liner layer to substantially cover the cavity;
forming a first metal layer over the liner layer;
forming a dielectric capping layer over the first metal layer and the a portion of the insulator layer;
forming a dielectric layer over the dielectric capping layer;
forming both a line and a via through a region of the dielectric layer and extending the via to expose a portion of the dielectric capping layer and a portion of the first metal layer, the via configured to receive an interconnect layer;
surface treating the line and the via, the surface treatment including treatment with one or more of Si, NH 3 , N 2 , P, B and O 2 and including thermal treatment and direct plasma treatment performed with electrical bias in the rage of 100˜800 W;
selectively removing one or more metal compounds from a portion of the via adjacent the first metal layer to thereby expose a first area on the first metal layer, wherein one or more of H 2 , He is used to remove one or more metal compounds performed under an electrical bias of less than 100 W;
depositing a second liner layer over the surface treated via and the first area; and
filling the via with a conductive material to form the interconnect;
wherein at least the steps of surface treating the patterned dielectric surface and removing one or more metal compounds are conducted at a first chamber and wherein the first metal layer and the conductive material comprise Cu, and
wherein the dielectric surface densifies the treated surface and changes the treated dielectric surface from hydrophobic to hydrophilic.