Epitaxial structure with pattern mask layers for multi-layer epitaxial buffer layer growth
An epitaxial structure including an epitaxial substrate, a first buffer layer, a first pattern mask layer, a second buffer layer and a second pattern mask layer. The first buffer layer is disposed on the epitaxial substrate. The first pattern mask layer is disposed on the first buffer layer. The second buffer layer is disposed on the first pattern mask layer and a part of the first buffer layer. The second pattern mask layer is disposed on the second buffer layer. A projection of the first pattern mask layer projected on the first buffer layer and a projection of the second pattern mask layer projected on the first buffer layer cover at least 70% of the total area of the first buffer layer.
1. An epitaxial structure, comprising:
an epitaxial substrate;
a first buffer layer, disposed on the epitaxial substrate;
a first pattern mask layer, disposed on the first buffer layer;
a second buffer layer, disposed on the first pattern mask layer and on a part of the first buffer layer; and
a second pattern mask layer, disposed on the second buffer layer, wherein in a cross section a pattern of the first pattern mask layer with a view from above the epitaxial substrate and a pattern of the second pattern mask layer with a view from above the epitaxial substrate are complementary to each other and are not overlapped with each other.
2. The epitaxial structure as claimed in claim 1 , wherein each of the projection of the first pattern mask layer projected on the first buffer layer and the projection of the second pattern mask layer projected on the first buffer layer covers approximately half of the total area of the first buffer layer.
3. The epitaxial structure as claimed in claim 1 , further comprising:
a nucleating layer, disposed between the epitaxial substrate and the first buffer layer.
4. The epitaxial structure as claimed in claim 3 , wherein the nucleating layer is in a monocrystalline structure.
5. The epitaxial structure as claimed in claim 1 , further comprising:
a first type semiconductor layer, disposed on the second pattern mask layer;
an active layer, disposed on the first type semiconductor layer; and
a second type semiconductor layer, disposed on the active layer.
6. The epitaxial structure as claimed in claim 5 , further comprising: a third buffer layer, disposed between the second pattern mask layer and the first type semiconductor layer.
7. The epitaxial structure as claimed in claim 1 , wherein materials of the first pattern mask layer and the second pattern mask layer comprise silicon oxide or silicon nitride.
8. The epitaxial structure as claimed in claim 1 , wherein a material of the epitaxial substrate comprises one of sapphire, Si, SiO 2 , GaN, AlN, spinnel, SiC, GaAs, LiGaO 2 , LiAlO 2 , and MgAl 2 O 4 .