Solid-state imaging device and imaging apparatus
A solid-state imaging device includes a plurality of pixels, wherein one or more of the plurality of pixels have a pupil dividing portion and a light receiving portion, the light receiving portion includes a plurality of photoelectric conversion regions, an element isolation region is provided between adjacent ones of the plurality of photoelectric conversion regions, and wherein a scatterer is provided within the pupil dividing portion and above the element isolation region, and the scatterer is formed from a material of a refractive index smaller than a refractive index of a material of the pupil dividing portion peripheral to the scatterer.
1. A solid-state imaging device comprising a plurality of pixels, wherein
at least one of the plurality of pixels has a pupil dividing portion and a plurality of photoelectric conversion regions, and wherein:
a scatterer is provided within the pupil dividing portion and adjacent to a region between two adjacent ones of the plurality of photoelectric conversion regions,
a refractive index of the scatterer is smaller than that of the pupil dividing portion peripheral to the scatterer,
the pupil dividing portion has a micro lens, and
the plurality of photoelectric conversion regions receive respective lights through the micro lens.
2. The solid-state imaging device according to claim 1 , wherein the scatterer is arranged at a position contacting a surface of the pupil dividing portion at a side of the plurality of photoelectric conversion regions.
3. The solid-state imaging device according to claim 1 , wherein the scatterer has, at a light incident side, an end portion beyond a paraxial imaging plane of the micro lens toward the light incident side.
4. The solid-state imaging device according to claim 1 , wherein the scatterer has a height of 1.0 μm or smaller.
5. The solid-state imaging device according to claim 4 , wherein the scatterer has a height of 0.6 μm or smaller.
6. The solid-state imaging device according to claim 1 , wherein the pupil dividing portion has a waveguide configured to guide an incident light onto the plurality of photoelectric conversion regions including a core and a cladding, and a refractive index of the core is larger than the refractive index of the scatterer, and larger than a refractive index of the cladding.
7. The solid-state imaging device according to claim 1 , wherein an area of a surface of the scatterer at a side of the plurality of photoelectric conversion regions is larger than an area of a surface of the scatterer at a light incident side.
8. The solid-state imaging device according to claim 1 , wherein an interlayer is arranged between the plurality of photoelectric conversion regions and the pupil dividing portion.
9. The solid-state imaging device according to claim 8 , wherein the interlayer operates as an anti-reflection layer suppressing a reflection of light in at least a part of a wavelength region of a light for use in imaging by the solid-state imaging device.
10. An imaging apparatus comprising:
a solid-state imaging device according to claim 1 ; and
an imaging lens configured to guide an external light into the solid-state imaging device.
11. The imaging apparatus according to claim 10 further comprising an arithmetic operation unit configured to calculate a distance from an object to be imaged.
12. The solid-state imaging device according to claim 1 , wherein the scatterer is provided on an optical axis of the micro lens.
13. The solid-state imaging device according to claim 12 , wherein the region between adjacent two of the plurality of photoelectric conversion regions is provided on an optical axis of the micro lens.
14. A solid-state imaging device comprising a plurality of pixels, wherein
at least one of the plurality of pixels has a pupil dividing portion and a plurality of photoelectric conversion regions, and wherein:
a scatterer and a high refractive index portion are provided within the pupil dividing portion,
the scatterer is adjacent to a region between two adjacent ones of the plurality of photoelectric conversion regions,
the high refractive index portion is adjacent to the adjacent two of the plurality of photoelectric conversion regions,
a refractive index of the scatterer is smaller than that of the high refractive index portion,
the pupil dividing portion has a micro lens, and
the plurality of photoelectric conversion regions receive respective lights through the micro lens.
15. The solid-state imaging device according to claim 14 , wherein the scatterer has a height of 1.0 μm or smaller.
16. The solid-state imaging device according to claim 14 , wherein the scatterer has a height of 0.6 μm or smaller.
17. The solid-state imaging device according to claim 14 , wherein an area of a surface of the scatterer at a side of the plurality of photoelectric conversion regions is larger than an area of a surface of the scatterer at a light incident side.
18. An imaging apparatus comprising:
a solid-state imaging device according to claim 14 ; and
an imaging lens configured to guide an external light into the solid-state imaging device.
19. The imaging apparatus according to claim 18 further comprising an arithmetic operation unit configured to calculate a distance from an object to be imaged.
20. The imaging apparatus according to claim 18 , wherein the plurality of photoelectric conversion regions receive though the micro lens respectively the lights from the different regions of a pupil of the imaging lens.
21. A solid-state imaging device comprising a plurality of pixels, wherein
at least one of the plurality of pixels includes:
a micro lens;
a first photoelectric conversion region configured to receive a part of light from the micro lens;
a second photoelectric conversion region configured to receive another part of the light from the micro lens, and
a scatterer provided between the micro lens and a region between the first photoelectric conversion region and the second photoelectric conversion region, and
wherein a refractive index of the scatterer is smaller than that of a material peripheral to the scatterer.
22. The solid-state imaging device according to claim 21 , wherein the scatterer is provided on an optical axis of the micro lens.
23. The solid-state imaging device according to claim 22 , wherein the region between two adjacent ones of the plurality of photoelectric conversion regions is provided on an optical axis of the micro lens.