Pellicle
There is provided a pellicle having a frame, a membrane and an agglutinant layer (adhesive to bond the pellicle on a photo mask) in which the release liner (detachable sheet) laid to the agglutinant layer for protection thereof is controlled to have a surface roughness of 5-30 micrometers on the side of the liner which is attached to the agglutinant layer, with a result that the releasability of the liner is improved suitably.
1. A pellicle comprising:
a pellicle frame having a first frame face and a second frame face,
a pellicle film bonded to said first frame face,
an agglutinant layer laid over said second frame face for gluing the pellicle onto a glass substrate, and
a release liner laid over said agglutinant layer to protect the agglutinant layer, said release liner comprising a base sheet and a parting agent laid over at least one face of the base sheet,
wherein arithmetic mean roughness (Ra) of a release-side face of the release liner is 5-30 micrometers, and
the surface roughness of the release-side face of the release liner is made by adding an additive in the base sheet of the release liner.
2. A pellicle as claimed in claim 1 , wherein said base sheet of said release liner is made of a flexible resin film.
3. A pellicle as claimed in claim 1 , wherein the surface roughness of the release-side face of the release liner is made by adding an additive in the base sheet.
4. A pellicle as claimed in claim 3 , wherein the additive is silica powder.