Large area nanopatterning method and apparatus
Embodiments of the invention relate to methods and apparatus useful in the nanopatterning of large area substrates, where a rotatable mask is used to image a radiation-sensitive material. Typically the rotatable mask comprises a cylinder. The nanopatterning technique makes use of Near-Field photolithography, where the mask used to pattern the substrate is in contact or close proximity with the substrate. The Near-Field photolithography may make use of an elastomeric phase-shifting mask, or may employ surface plasmon technology, where a rotating cylinder surface comprises metal nano holes or nanoparticles.
1. An apparatus to carry out near-field lithography, comprising:
a) a rotatable mask having a nanopattern on an exterior surface of said mask, wherein said nanopattern is formed from a conformable material; and
b) a radiation source which supplies radiation of a wavelength of 436 nm or less from said nanopattern, while said nanopattern is in contact with a radiation-sensitive layer of material, wherein said rotatable mask is a cylinder, wherein said rotatable mask is transparent, and wherein said rotatable mask is a phase-shifting mask.
2. An apparatus in accordance with claim 1 , wherein a rotatable mask is suspended over said substrate by a tensioning device which can be adjusted to control the amount of force applied to a surface in contact with said rotatable mask.
3. An apparatus to carry out near-field lithography, comprising:
a) a rotatable mask having a nanopattern on an exterior surface of said mask, wherein said nanopattern is formed from a conformable material; and
b) a radiation source which supplies radiation of a wavelength of 436 nm or less from said nanopattern, while said nanopattern is in contact with a radiation-sensitive layer of material, wherein said rotatable mask includes a rigid cylinder, wherein the conformable material is a transparent film on an outer surface of the rigid cylinder, and wherein said rotatable mask further includes a metal layer on the transparent film, wherein said rotatable mask is configured to employ radiation generated using surface plasmon techniques to produce photochemical or photophysical changes in a layer below the metal layer.
4. An apparatus in accordance with claim 3 , wherein the metal layer includes nanoholes.
5. An apparatus in accordance with claim 4 , wherein multiple rotatable masks are present in an arrangement so that said multiple rotatable masks pass over a substrate in sequence.
6. An apparatus in accordance with claim 4 , wherein multiple rotatable masks are present, and wherein a rotatable mask is present on both the top side and bottom side of a substrate which is imaged by said apparatus.
7. An apparatus in accordance with claim 6 , wherein at least one rotatable mask which transmits imaging radiation is present on both the top side and the bottom side of a substrate which is imaged by said apparatus.
8. An apparatus to carry out near-field lithography, comprising:
a) a rotatable mask having a nanopattern on an exterior surface of said mask, wherein said nanopattern is formed from a conformable material, wherein either said deformable cylinder is transparent, and wherein said rotatable mask is a phase-shifting mask, or said rotatable mask employs radiation generated using surface plasmon techniques; and
b) a radiation source which supplies radiation of a wavelength of 436 nm or less from said nanopattern, while said nanopattern is in contact with a radiation-sensitive layer of material, wherein said rotatable mask includes a deformable cylinder formed from a flexible material, wherein said deformable cylinder is pressurized with an optically transparent gas.