Laser processing apparatus
A laser processing apparatus includes a holding table for holding a workpiece, a laser beam applying unit for applying a laser beam to the workpiece, a feeding mechanism for relatively moving the holding table and the laser beam applying unit, a detector for applying detection light to the workpiece and detecting the quantity of reflected light obtained by the reflection of the detection light from the workpiece, and a controller for determining whether or not the workpiece is present at a laser beam applying position according to a detection signal output from the detector. The holding table includes a holding member for holding the workpiece under suction and an annular mount member provided so as to surround the holding member for mounting the holding member. The mount member has an upper surface treated by an irregular reflection process for irregularly reflecting light.
1. A laser processing apparatus comprising:
a holding table for holding a workpiece;
laser beam applying means for applying a laser beam to said workpiece held on said holding table;
moving means for relatively moving said holding table and said laser beam applying means;
detecting means for applying detection light to said workpiece held on said holding table and detecting the quantity of reflected light obtained by the reflection of said detection light from said workpiece; and
control means for determining whether or not said workpiece is present at a laser beam applying position according to a detection signal output from said detecting means;
wherein said holding table includes a holding member for holding said workpiece under suction and an annular mount member provided so as to surround said holding member for mounting said holding member, said mount member having an upper surface treated by an irregular reflection process for irregularly reflecting light.
2. The laser processing apparatus according to claim 1 , wherein said irregular reflection process comprises blasting.