Epitaxy base, semiconductor light emitting device and manufacturing methods thereof
An epitaxy base including a substrate and a nucleating layer disposed on the substrate. The nucleating layer is an AlN layer with a single crystal structure. A diffraction pattern of the nucleating layer includes a plurality of dot patterns. Each of the dot patterns is substantially circular, and a ratio between lengths of any two diameters perpendicular to each other on each of the dot patterns ranges from approximately 0.9 to approximately 1.1. A semiconductor light emitting device, a manufacturing method of the epitaxy base, and a manufacturing method of the light emitting semiconductor device are further provided.
1. An epitaxy base, comprising:
a substrate; and
a nucleating layer, disposed on the substrate, wherein the nucleating layer is an aluminum nitride layer having a single crystal structure and the lattice thereof with no continuous change along a C direction is well-organized, an electron diffraction pattern of the nucleating layer comprises a plurality of dot patterns, each of the dot patterns is substantially circular, and a ratio between lengths of any two diameters perpendicular to each other on each of the dot patterns ranges from approximately 0.9 to approximately 1.1.
2. The epitaxy base as claimed in claim 1 , wherein a surface of the substrate close to the nucleating layer is a plane.
3. The epitaxy base as claimed in claim 1 , wherein the nucleating layer is formed on the substrate by sputtering.
4. The epitaxy base as claimed in claim 1 , further comprising a buffer layer disposed on the nucleating layer.
5. The epitaxy base as claimed in claim 1 , wherein the substrate a sapphire substrate.
6. A manufacturing method of an epitaxy base, comprising:
providing a substrate; and
forming a nucleating layer in a form of a single crystal structure on the substrate by sputtering, wherein the nucleating layer is an aluminum nitride layer and the lattice thereof with no continuous change along a C direction is well-organized, an electron diffraction pattern of the nucleating layer comprises a plurality of dot patterns, each of the dot patterns is substantially circular, and a ratio between lengths of any two diameters perpendicular to each other on each of the dot patterns ranges from approximately 0.9 to approximately 1.1.
7. An epitaxy base, comprising:
a substrate;
a nucleating layer, disposed on the substrate, wherein the nucleating layer is an aluminum nitride layer having a single crystal structure, an electron diffraction pattern of the nucleating layer comprises a plurality of dot patterns, each of the dot patterns is substantially circular, and a ratio between lengths of any two diameters perpendicular to each other on each of the dot patterns ranges from approximately 0.9 to approximately 1.1; and
an undoped GaN buffer layer, disposed on the nucleating layer.
8. The epitaxy base as claimed in claim 7 , wherein a surface of the substrate close to the nucleating layer is a plane.
9. The epitaxy base as claimed in claim 7 , wherein the nucleating layer is formed on the substrate by sputtering.