IP Library Granted Patent US 9,698,370
Granted Patent B2
US 9,698,370 · App. 14/367,252 · Granted Jul 4, 2017

Gas barrier film and gas barrier film production method

Inventors: Satoshi Naganawa (Tokyo, JP); Yuta Suzuki (Tokyo, JP)
Assignee: LINTEC CORPORATION
H01L51/5253C08J7/047C23C14/48C08J2367/02C08J2483/16Y10T428/24942
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Quick Facts
Patent No.
US 9,698,370
App. No.
14/367,252
Granted
Jul 4, 2017
Kind
B2
Abstract

The present invention is aiming to provide a gas barrier film having excellent gas barrier properties and also having superior transparency and the like, and an efficient method for producing such a gas barrier film. The present invention provides a gas barrier film having a gas barrier layer on a base material, and a method for producing such a gas barrier film, in which the gas barrier layer includes, from the surface side toward the base material side, a first region and a second region having different refractive indices, the value of the refractive index in the first region is adjusted to a value within the range of 1.50 to 1.68, and the value of the refractive index in the second region is adjusted to a value within the range of 1.40 to below 1.50.

Claims (12)

1. A method for producing a gas barrier film having a gas barrier layer on a base material, the method comprising the following steps (1) to (3):

(1) a polysilazane layer forming step of forming a polysilazane layer on the base material;

(2) a seasoning step of performing seasoning of the polysilazane layer at a temperature of 15° C. to 35° C. for 24 hours to 240 hours to adjust the refractive index of the polysilazane layer to a value within the range of 1.50 to 1.58; and then

(3) an ion implantation step of implanting ions into the polysilazane layer, and forming a gas barrier layer including, from the surface side toward the base material side, a first region having a refractive index of a value within the range of 1.50 to 1.68, and a second region having a refractive index of a value within the range of 1.40 to below 1.50,

wherein the yellowness index (YI) of the gas barrier layer is adjusted to a value of 1.0 to 3.6,

the total light transmission (Tt) of the gas barrier layer is adjusted to a value of 88% or more, and

the water vapor transmission rate (WVTR) of the gas barrier layer is adjusted to a value of 0.05 g (m 2 ·day) or less.

2. The method for producing a gas barrier film according to claim 1 , wherein the film density in the first region is adjusted to a value within the range of 2.3 g/cm 3 to 3.0 g/cm 3 .

3. The method for producing a gas barrier film according to claim 1 , wherein the thickness of the first region is adjusted to a value within the range of 10 nm to 30 nm.

4. The method for producing a gas barrier film according to claim 1 , wherein in the first region, when the amount of oxygen measured by XPS is designated as X mol %, the amount of nitrogen is designated as Y mol %, and the amount of silicon is designated as Z mol %, the ratio X/Z is adjusted to a value within the range of 1.0 to 2.5, and the ratio Y/Z is adjusted to a value within the range of 0 to 0.5.

5. The method for producing a gas barrier film according to claim 1 , wherein in the first region, the amount of oxygen measured by XPS is designated as X mol %, the amount of silicon is designated as Z mol %, and a curve of the ratio X/Z from the surface side toward the base material has a minimum point.

6. The method for producing a gas barrier film according to claim 1 , wherein in the first region, the amount of silicon measured by XPS is adjusted to a value within the range of 25 to 45 mol %, the amount of oxygen is adjusted to a value within the range of 54 to 74 mol %, and the amount of nitrogen is adjusted to a value within the range of 0.1 to 15 mol %, relative to a total amount of the amount of silicon, the amount of oxygen, and the amount of nitrogen.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2014
From: NAGANAWA, SATOSHI; SUZUKI, YUTA
To: LINTEC CORPORATION
Reel/Frame 033144/0833 →
Priority Claims (1)
JP 2012-010110 · Jan 20, 2012 · national
Continuity (1)
Related Publication 20150287954A1 · Oct 8, 2015