IP Library Granted Patent US 9,711,595
Granted Patent B2
US 9,711,595 · App. 15/132,330 · Granted Jul 18, 2017

Semiconductor device including a semiconductor sheet unit interconnecting a source and a drain

Inventors: Jiun-Peng Wu (Hsinchu, TW); Tetsu Ohtou (Hsinchu, TW); Ching-Wei Tsai (Hsinchu, TW); Chih-Hao Wang (Hsinchu County, TW); Chi-Wen Liu (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
H01L29/0676H01L21/8234H01L21/823814H01L21/823885H01L29/06H01L29/0665H01L29/4238H01L29/7827
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,711,595
App. No.
15/132,330
Granted
Jul 18, 2017
Kind
B2
Abstract

A semiconductor device includes a substrate, a pair of source/drain units, and a semiconductor sheet unit. The substrate includes a well region. The source/drain units are disposed above the well region. The semiconductor sheet unit is disposed substantially vertically, interconnects the source/drain units, and defines a cross-sectional shape unit in a top view. The cross-sectional shape unit includes a plurality of cross-sections that have substantially the same shape and different sizes.

Claims (35)

1. A semiconductor device comprising:

a substrate including a well region;

a pair of source/drain units disposed above the well region; and

a semiconductor sheet unit disposed substantially vertically, interconnecting the source/drain units, and defining a cross-sectional shape unit of the semiconductor sheet unit in a top view, wherein the cross-sectional shape unit of the semiconductor sheet unit in the top view includes a plurality of cross-sections that have substantially the same non-circular shape and different sizes.

2. The semiconductor device of claim 1 , wherein each of the cross sections is a generally straight line cross section.

3. The semiconductor device of claim 1 , wherein each of the cross sections includes a pair of straight lines that define an angle therebetween.

4. The semiconductor device of claim 1 , wherein each of the cross sections is curved.

5. The semiconductor device of claim 1 , wherein the substrate further includes a second well region that has a conductivity type different from a conductivity type of the well region, the semiconductor device further comprising:

a pair of second source/drain units disposed above the second well region; and

a second semiconductor sheet unit disposed substantially vertically and interconnecting the second source/drain units.

6. The semiconductor device of claim 5 , wherein the second semiconductor sheet unit defines in the top view a cross-sectional shape unit different from the cross-sectional shape unit of the semiconductor sheet unit.

7. The semiconductor device of claim 1 , further comprising a gate stack surrounding the semiconductor sheet unit.

8. A semiconductor device comprising:

a substrate including a well region;

a pair of source/drain units disposed above the well region; and

a semiconductor sheet unit disposed substantially vertically, interconnecting the source/drain units, and defining a cross-sectional shape unit of the semiconductor sheet unit in a top view, wherein the cross-sectional shape unit of the semiconductor sheet unit in the top view includes a plurality of cross-sections that have different shapes.

9. The semiconductor device of claim 8 , wherein one of the cross sections is a generally straight line cross section.

10. The semiconductor device of claim 8 , wherein one of the cross sections includes a pair of straight lines that define an angle therebetween.

11. The semiconductor device of claim 8 , wherein one of the cross sections is curved.

12. The semiconductor device of claim 8 , wherein the substrate further includes a second well region that has a conductivity type different from a conductivity type of the well region, the semiconductor device further comprising:

a pair of second source/drain units disposed above the second well region; and

a second semiconductor sheet unit disposed substantially vertically and interconnecting the second source/drain units.

13. The semiconductor device of claim 12 , wherein the second semiconductor sheet unit defines in the top view a cross-sectional shape unit different from the cross-sectional shape unit of the semiconductor sheet unit.

14. The semiconductor device of claim 8 , further comprising a gate stack surrounding the semiconductor sheet unit.

15. A semiconductor device comprising:

a substrate including a well region;

a pair of source/drain units disposed above the well region; and

a semiconductor sheet unit disposed substantially vertically, interconnecting the source/drain units, and defining a cross-sectional shape of the semiconductor sheet unit in a top view that is neither a straight line nor a circular shape.

16. The semiconductor device of claim 15 , wherein the cross-sectional shape of the semiconductor sheet unit in the top view includes a pair of straight lines that define an angle therebetween.

17. The semiconductor device of claim 15 , wherein the cross-sectional shape of the semiconductor sheet unit in the top view is curved.

18. The semiconductor device of claim 15 , wherein the substrate further includes a second well region that has a conductivity type different from a conductivity type of the well region, the semiconductor device further comprising:

a pair of second source/drain units disposed above the second well region; and

a second semiconductor sheet unit disposed substantially vertically and interconnecting the second source/drain units.

19. The semiconductor device of claim 18 , wherein the second semiconductor sheet unit defines in the top view a cross-sectional shape different from the cross-sectional shape of the semiconductor sheet unit.

20. The semiconductor device of claim 15 , further comprising a gate stack surrounding the semiconductor sheet unit.

Continuity (2)
Continuation 14312739 · Jun 24, 2014
Related Publication 20160233302A1 · Aug 11, 2016