IP Library Granted Patent US 9,721,856
Granted Patent B2
US 9,721,856 · App. 14/750,471 · Granted Aug 1, 2017

Implementing resistance defect performance mitigation using test signature directed self heating and increased voltage

Inventors: Karl R. Erickson (Rochester, MN); Phil C. Paone (Rochester, MN); David P. Paulsen (Inver Grove Heights, MN); John E. Sheets, II (Zumbrota, MN); Gregory J. Uhlmann (Rochester, MN)
Assignee: International Business Machines Corporation
H01L22/22G01R31/2868G01R31/2894G01R31/31707G05B19/41875G05B2219/40361
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Quick Facts
Patent No.
US 9,721,856
App. No.
14/750,471
Granted
Aug 1, 2017
Kind
B2
Abstract

A method and system are provided for implementing resistive defect performance mitigation for integrated circuits. A test is generated for identifying resistive defects. A first self heating repair process is performed for repairing resistive defects. Testing is performed to identify a mitigated resistive defect and a functional integrated circuit. Responsive to identifying a resistive defect not being mitigated and a functional integrated circuit, a second repair process is performed, then testing is performed again.

Claims (19)

1. A computer system for implementing resistive defect performance mitigation for integrated circuits comprising:

a processor;

a test generator;

a resistive defect performance mitigation control;

said processor using said test generator and said resistive defect performance mitigation control to implement resistive defect performance mitigation for a sample integrated circuits;

said processor using said test generator for identifying resistive defects;

said processor using said resistive defect performance mitigation control for performing a first self heating repair process for repairing resistive defects;

said processor using said test generator for performing testing to identify a mitigated resistive defect and a functional integrated circuit; and

said processor using said resistive defect performance mitigation control responsive to identifying a resistive defect not being mitigated and a functional integrated circuit, for performing a second repair process, and repeating testing to identify a mitigated resistive defect and a functional integrated circuit.

2. The system as recited in claim 1 includes control code stored on a computer readable medium, and wherein said processor uses said control code for implementing resistive defect performance mitigation for integrated circuits.

3. The system as recited in claim 1 wherein the first self heating repair process includes repeatedly switching a signal to a circuit path containing the resistive defect at a selected frequency and a selected voltage for a set duration.

4. The system as recited in claim 3 wherein said selected frequency is approximately equal or slightly above a maximum frequency at which the integrated circuit functions, and said set duration equals a set number of microseconds allowing millions of switches.

5. The system as recited in claim 3 wherein the repeated switching is provided at a set elevated voltage to enhance localized heating and stressing of any residual dielectric films in the connecting area.

6. The system as recited in claim 1 wherein repairing resistive defects includes one or more of repairing resistive connections in a contact, a via, and a high resistance defect present in an internally embedded interconnect.

7. The system as recited in claim 1 wherein performing testing to identify a mitigated resistive defect and a functional integrated circuit includes said processor using said resistive defect performance mitigation control, applying an appropriate voltage for use of the integrated circuit to a defect node, and testing to identify a mitigated resistive defect and a functional integrated circuit.

8. The system as recited in claim 1 wherein said second repair process includes said processor using said resistive defect performance mitigation control, using a laser to enhance the local heating.

9. The system as recited in claim 1 wherein said second repair process includes said processor using said resistive defect performance mitigation control, providing incremental voltage steps to a defect node and repeating until a mitigated resistive defect is identified or a maximum voltage is reached.

10. The system as recited in claim 1 includes said processor using said resistive defect performance mitigation control, identifying a successful repair, responsive to identifying a resistive defect being mitigated and a functional integrated circuit being identified.

11. The system as recited in claim 1 includes said processor using said resistive defect performance mitigation control, discarding the integrated circuit, responsive to a functional integrated circuit not being identified.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 25, 2015
From: ERICKSON, KARL R.; PAONE, PHIL C.; SHEETS, JOHN E., II; UHLMANN, GREGORY J.; PAULSEN, DAVID P.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 035955/0696 →
Continuity (1)
Related Publication 20160379898A1 · Dec 29, 2016