IP Library Granted Patent US 9,761,739
Granted Patent B2
US 9,761,739 · App. 14/580,143 · Granted Sep 12, 2017

High speed photosensitive devices and associated methods

Inventors: James E. Carey (Waltham, MA); Drake Miller (Tigard, OR)
Assignee: SiOnyx, LLC
H01L31/02024H01L27/1446H01L27/14629H01L27/14643H01L31/028H01L31/02363H01L31/103Y02E10/50
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Quick Facts
Patent No.
US 9,761,739
App. No.
14/580,143
Granted
Sep 12, 2017
Kind
B2
Abstract

High speed optoelectronic devices and associated methods are provided. In one aspect, for example, a high speed optoelectronic device can include a silicon material having an incident light surface, a first doped region and a second doped region forming a semiconductive junction in the silicon material, and a textured region coupled to the silicon material and positioned to interact with electromagnetic radiation. The optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.4 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm.

Claims (31)

1. A high speed optoelectronic device for detecting infrared radiation, comprising:

a silicon material having a thickness in a range of about 1 micron to about 100 microns and having a surface for receiving incident radiation;

a first doped region and a second doped region forming a semiconductive junction in the silicon material; and

a textured region having nanosized features and coupled to the silicon material and positioned to interact with electromagnetic radiation;

wherein the optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.4 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm.

2. The device of claim 1 , wherein the optoelectronic device has a responsivity of greater than or equal to about 0.5 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm.

3. The device of claim 1 , wherein the optoelectronic device has a response time of from 1 picosecond to about 1 nanosecond.

4. The device of claim 1 , wherein the optoelectronic device has a data rate greater than or equal to about 1 Gbs.

5. The device of claim 1 , further comprising a first contact and a second contact wherein the first contact is opposite in voltage polarity from the second contact.

6. The device of claim 5 , wherein a reverse bias is applied across the first and second contacts.

7. The device of claim 6 , wherein a bias is not applied across the first and second contacts during use.

8. The device of claim 1 , wherein dark current of the device during operation is from about 100 pA/cm 2 to about 10 nA/cm 2 .

9. The device of claim 1 , wherein the textured region is positioned on an opposite side of the silicon material from the surface for receiving incident light.

10. The high speed optoelectronic device of claim 1 , wherein said textured region is laser generated.

11. A high speed optoelectronic device for detecting infrared radiation, comprising:

a silicon material having a thickness in a range of about 1 micron to about 10 microns and having a surface for receiving incident radiation;

a first doped region and a second doped region forming a semiconductive junction in the silicon material; and

a textured region having nanosized features and coupled to the silicon material and positioned to interact with electromagnetic radiation;

wherein the optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.05 A/W for electromagnetic radiation having a wavelength of about 1060 nm.

12. A photodiode array for detecting infrared radiation, comprising

a silicon material having a thickness in a range of about 1 micron to about 100 microns and having a surface for receiving incident radiation;

at least two photodiodes in the silicon material, each photodiode including a first doped region and a second doped region forming a junction; and

a textured region having nanosized features and coupled to the silicon material and positioned to interact with electromagnetic radiation;

wherein the photodiode array has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.4 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm.

13. The array of claim 12 , wherein the at least two photodiodes are four photodiodes forming a quad array.

14. The array of claim 13 , wherein the four photodiodes of the quad array are selective to a single wavelength range.

15. The array of claim 12 , wherein the array is an image sensor.

16. The array of claim 12 , wherein the array is operable to detect a phase delay between a reflected and an emitted optical signal.

17. The array of claim 12 , wherein the array is operable to detect pulsed optical signals.

18. The array of claim 12 , wherein the at least two photodiodes are operable to transmit data at a rate of at least 1 Gbps.

19. The photodiode array of claim 12 , wherein said textured region is laser generated.

Assignments (2)
CHANGE OF NAME Recorded Jan 6, 2016
From: SIONYX, INC.
To: SIONYX, LLC
Reel/Frame 037449/0544 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 18, 2015
From: CAREY, JAMES E.; MILLER, DRAKE
To: SIONYX, INC.
Reel/Frame 036604/0645 →
Continuity (3)
Continuation 13164630 · Jun 20, 2011
Provisional Application 61356536 · Jun 18, 2010
Related Publication 20150349150A1 · Dec 3, 2015