Flexible substrate repair structure, manufacturing method thereof, and inspection and repair method of flexible substrate

1. A flexible substrate repair structure, comprising:

a flexible substrate having a regular recess; and

at least one repair layer located on the flexible substrate and completely filled in the regular recess,

wherein a material of the at least one repair layer is a polysilazane compound comprising a polysilazane compound having a unit shown in formula (1) below,

wherein R x , R y and R z are respectively hydrogen, a substituted C 1 to C 10 alkyl group, an unsubstituted alkyl group, an alkenyl group, or an aromatic group.

2. The flexible substrate repair structure according to claim 1 , wherein the regular recess is a recess having a smooth contour.

3. The flexible substrate repair structure according to claim 2 , wherein a shape of an opening of the regular recess comprises a circular shape, an oval shape, a rectangular shape, or a polygonal shape.

4. The flexible substrate repair structure according to claim 1 , wherein in the repair layer in contact with the flexible substrate, a nitrogen atom percentage at a side adjacent to the flexible substrate is less than a nitrogen atom percentage at another side away from the flexible substrate.

5. The flexible substrate repair structure according to claim 1 , wherein the at least one repair layer is a plurality of repair layers.

6. The flexible substrate repair structure according to claim 5 , wherein a variation of a nitrogen atom percentage of the plurality of repair layers in a normal direction of the flexible substrate is alternately high and low.

7. A manufacturing method of a flexible substrate repair structure, comprising:

coating a repair solution on a flexible substrate, wherein a capillary index of the repair solution is less than 10 −5 ;

removing a solvent in the repair solution to form at least one repair material layer; and

performing an optical adjustment step to change a refractive index of the at least one repair material layer to form the at least one repair layer.

8. The manufacturing method of a flexible substrate repair structure according to claim 7 , wherein a solute of the repair solution comprises a silazane compound having a unit shown in formula (1) below,

wherein R x , R y and R z are respectively a hydrogen atom, a substituted C 1 to C 10 alkyl group, an unsubstituted alkyl group, an alkenyl group, or an aromatic group.

9. The manufacturing method of a flexible substrate repair structure according to claim 8 , wherein the optical adjustment step comprises adjusting a nitrogen atom percentage in the at least one repair material layer.

10. The manufacturing method of a flexible substrate repair structure according to claim 7 , wherein the optical adjustment step comprises performing a heat treatment on the at least one repair material layer to reduce the nitrogen atom percentage of the at least one repair material layer.

11. The manufacturing method of a flexible substrate repair structure according to claim 10 , further comprising performing a post-treatment on the at least one repair layer after the heat treatment is performed to lower a nitrogen atom percentage of the at least one repair layer.

12. The manufacturing method of a flexible substrate repair structure according to claim 7 , wherein the optical adjustment step comprises performing a plasma treatment on the at least one repair material layer to increase the nitrogen atom percentage of the at least one repair material layer.

13. The manufacturing method of a flexible substrate repair structure according to claim 7 , wherein forming the at least one repair layer on the flexible substrate comprises forming a plurality of repair layers on the flexible substrate.

14. The manufacturing method of a flexible substrate repair structure according to claim 13 , wherein methods and parameters used in the optical adjustment step to form every one of the repair layers are the same.

15. The manufacturing method of a flexible substrate repair structure according to claim 13 , wherein at least one of methods and parameters used in the optical adjustment step to form every one of the repair layers is different.

16. The manufacturing method of a flexible substrate repair structure according to claim 13 , wherein a variation of a nitrogen atom percentage of the plurality of repair layers in a normal direction of the flexible substrate surface is made alternately high and low by the optical adjustment step.

17. The manufacturing method of a flexible substrate repair structure according to claim 7 , further comprising performing a removing step before the at least one repair layer is formed to remove a defect located on the flexible substrate and/or in the flexible substrate.

18. The manufacturing method of a flexible substrate repair structure according to claim 17 , wherein the removing step comprises performing pulse laser etching or polishing a surface of the flexible substrate.

19. The manufacturing method of a flexible substrate repair structure according to claim 7 , further comprising performing a hydrophilic treatment on the flexible substrate before the at least one repair layer is formed.

20. An inspection and repair method of a flexible substrate, comprising:

inspecting a flexible substrate to determine whether the flexible substrate has a defect;

categorizing the inspected defect according to a type or a location of the defect if an inspection result shows the flexible substrate has the defect; and

performing the manufacturing method of a flexible substrate repair structure according to claim 7 .