Apparatus and method for producing group III nitride semiconductor device and method for producing semiconductor wafer
The production apparatus includes a shower head electrode, a susceptor for supporting a growth substrate, a first gas supply pipe, and a second gas supply pipe. The first gas supply pipe has at least one first gas exhaust outlet and supplies an organometallic gas containing Group III metal as a first gas, and the second gas supply pipe supplies a gas containing nitrogen gas as the second gas. The distance between the shower head electrode and the susceptor is greater than the distance between the first gas exhaust outlet of the first gas supply pipe and the susceptor.
1. An apparatus for producing a Group III nitride semiconductor device, the apparatus comprising:
a furnace body;
a first electrode to which a periodically varying electric potential is applied;
a substrate support member for supporting a substrate;
a first gas supply pipe for supplying a first gas to the substrate support member; and
a second gas supply pipe for supplying a second gas to the substrate support member,
wherein the first electrode and the substrate support member are in the furnace body,
wherein the first gas supply pipe comprises at least one first gas exhaust outlet and supplies an organometallic gas containing a Group III metal as the first gas to the substrate support member, without passing through a plasma generation region;
the second gas supply pipe supplies a gas containing nitrogen gas as the second gas; and
a distance between the first electrode and the substrate support member is greater than a distance between the at least one first gas exhaust outlet of the first gas supply pipe and the substrate support member.
2. The apparatus for producing a Group III nitride semiconductor device according to claim 1 , wherein the first gas supply pipe supplies the organometallic gas containing Al, Ga, or In, and the substrate support member supports the substrate for growing the Group III nitride semiconductor.
3. The apparatus for producing a Group III nitride semiconductor device according to claim 1 , wherein the first electrode is a plate-form electrode provided with a plurality of through-holes perforating the electrode from a first surface to a second surface thereof, and the second gas supply pipe communicates with the plurality of through-holes of the first electrode.
4. The apparatus for producing a Group III nitride semiconductor device according to claim 1 , further comprising:
a ring member which is directly connected to the first gas supply pipe.
5. The apparatus for producing a Group III nitride semiconductor device according to claim 4 , wherein the first gas exhaust outlet is disposed inwardly to the inside of the ring member.
6. The apparatus for producing a Group III nitride semiconductor device according to claim 1 , wherein the first electrode is not a waveguide slot antenna.
7. The apparatus for producing a Group III nitride semiconductor device according to claim 1 , wherein the apparatus is to deposit a Group III nitride semiconductor.
8. The apparatus for producing a Group III nitride semiconductor device according to claim 1 , wherein the plasma gas region comprises a material gas of a Group III nitride semiconductor.
9. The apparatus for producing a Group III nitride semiconductor device according to claim 1 , wherein a distance between the first electrode and the first gas exhaust outlet is 30 mm or greater.
10. The apparatus for producing a Group III nitride semiconductor device according to claim 2 , wherein a distance between the first electrode and the first gas exhaust outlet is 30 mm or greater.
11. The apparatus for producing a Group III nitride semiconductor device according to claim 1 , wherein a distance between the first electrode and the substrate support member is 40 mm or greater.
12. The apparatus for producing a Group III nitride semiconductor device according to claim 2 , wherein a distance between the first electrode and the substrate support member is 40 mm or greater.
13. The apparatus for producing a Group III nitride semiconductor device according to claim 1 , wherein the apparatus comprises a metal mesh member, and the metal mesh member is disposed between the first gas supply pipe and the first electrode.
14. The apparatus for producing a Group III nitride semiconductor device according to claim 4 , wherein the apparatus comprises a metal mesh member, and the metal mesh member is disposed between the ring member and the first electrode.
15. The apparatus for producing a Group III nitride semiconductor device according to claim 1 , wherein the apparatus comprises an RF power source that can impart an electric potential of a frequency of 30 MHz to 300 MHz to the first electrode.
16. The apparatus for producing a Group III nitride semiconductor device according to claim 2 , wherein the apparatus comprises an RF power source that can impart an electric potential of a frequency of 30 MHz to 300 MHz to the first electrode.
17. The apparatus for producing a Group III nitride semiconductor device according to claim 1 , wherein the second gas supply pipe supplies, as the second gas, a gas mixture containing nitrogen gas and hydrogen gas.
18. The apparatus for producing a Group III nitride semiconductor device according to claim 4 , wherein the apparatus comprises a plasma generation region between the first electrode and the ring member, and a non-plasma region between the ring member and the substrate support member,
the ring member supplying the organometallic gas to the substrate support member passing through the non-plasma region, without passing through the plasma generation region, and
the second gas supply pipe supplying the second gas to the substrate support member passing through the plasma generation region and the non-plasma region.
19. An apparatus for producing a Group III nitride semiconductor device, the apparatus comprising:
a furnace body;
a first electrode located in the furnace body, and to which periodically varying electric potential is applied for generating a plasma generation region in the furnace body;
a substrate support member located in the furnace body, for supporting a substrate;
a first gas supply pipe for supplying a first gas to the substrate support member; and
a second gas supply pipe for supplying a second gas to the substrate support member,
wherein the first gas supply pipe comprises at least one first gas exhaust outlet and supplies an organometallic gas containing a Group III metal as the first gas to the substrate support member, without passing through the plasma generation region;
the second gas supply pipe supplies a gas containing nitrogen gas as the second gas; and
a distance between the first electrode and the substrate support member is greater than a distance between the at least one first gas exhaust outlet of the first gas supply pipe and the substrate support member.
20. An apparatus for producing a Group III nitride semiconductor device, the apparatus comprising:
a furnace body;
a first electrode located in the furnace body, and to which periodically varying electric potential is applied for generating a plasma generation region in the furnace body;
a substrate support member located in the furnace body, for supporting a substrate;
a first gas supply pipe for supplying a first gas to the substrate support member; and
a second gas supply pipe for supplying a second gas to the substrate support member,
wherein the first gas supply pipe comprises at least one first gas exhaust outlet and supplies an organometallic gas containing a Group III metal as the first gas to a region inside the furnace body which is between the first electrode and the substrate support member and outside the plasma generation region;
the second gas supply pipe supplies a gas containing nitrogen gas as the second gas; and
a distance between the first electrode and the substrate support member is greater than a distance between the at least one first gas exhaust outlet of the first gas supply pipe and the substrate support member.