Resistive random access memory (RRAM) structure
A resistive random access memory (RRAM) cell comprises a transistor having a gate and a source/drain region, a bottom electrode coplanar with the gate, a resistive material layer over the bottom electrode, a top electrode over the resistive material layer, and a conductive material electrically connecting the bottom electrode to the source/drain region.
1. A semiconductor device, comprising:
a transistor having a gate and a source/drain region formed on a semiconductor substrate; and
a resistive random access memory (RRAM) structure adjacent the transistor, the RRAM structure comprising:
a bottom electrode coplanar with the gate;
a resistive material layer over the bottom electrode; and
a top electrode over the resistive material layer; and
a conductive material connecting the RRAM structure to the source/drain region wherein the conductive material physically interfaces the source/drain region and bottom electrode of the RRAM structure.
2. The semiconductor device of claim 1 , further comprising:
a contact extending from and over another source/drain region of the transistor; and
a first metal layer over and interfacing with the contact.
3. The semiconductor device of claim 2 , wherein the conductive material is coplanar with the contact.
4. The semiconductor device of claim 1 , wherein the bottom electrode and a gate electrode of the gate comprise a same material.
5. The semiconductor device of claim 1 , wherein the bottom electrode and the gate comprise at least one of aluminum, titanium, titanium nitride, tantalum nitride, and polysilicon.
6. The semiconductor device of claim 1 , further comprising:
a dielectric between the bottom electrode and the semiconductor substrate.
7. The semiconductor device of claim 1 , a spacer on a sidewall of the bottom electrode.
8. The semiconductor device of claim 1 , wherein the bottom electrode has a first width and the resistive material layer has a second width, the second width less than the first width.
9. The semiconductor device of claim 8 , wherein the gate has a third width less than the first width.
10. A memory cell structure, comprising:
a transistor comprising a gate and a source/drain region; and
a resistive random access memory (RRAM) structure comprising:
a bottom electrode;
a resistive material layer over the bottom electrode; and
a top electrode over the resistive material layer;
wherein a first spacer is disposed on sidewalls of the gate; and
a second spacer is disposed on sidewalls of the bottom electrode.
11. The memory cell structure of claim 10 , further comprising:
a shallow trench isolation (STI) structure under at least a portion of the bottom electrode.
12. The memory cell of claim 11 , further comprising:
a dielectric layer disposed between the STI structure and the bottom electrode.
13. The memory cell of claim 12 , wherein the dielectric layer is coplanar with a gate dielectric layer of the gate of the transistor.
14. The memory cell of claim 11 , wherein another portion of the bottom electrode is disposed over an active region adjacent to the STI structure, and wherein the source/drain region is also disposed in the active region.
15. The memory cell of claim 10 , wherein the source/drain region includes a first edge collinear with the first spacer edge and a second opposing edge of the source/drain region is collinear with the second spacer edge.
16. The memory cell of claim 10 , further comprising:
a conductive material extending from and over the source/drain region to over the bottom electrode.
17. The memory cell of claim 16 , wherein the conductive material electrically connects the bottom electrode and the source/drain region.
18. A semiconductor device, comprising:
a memory cell disposed on a semiconductor substrate, the memory cell, comprising:
a transistor having a first source/drain region and a second source/drain region wherein a contact extends from the first source/drain region;
a bottom electrode adjacent to the source/drain region and disposed over the semiconductor substrate;
a dielectric between the bottom electrode and the semiconductor substrate;
a resistive material layer over the bottom electrode;
a top electrode over the resistive material layer; and
a conductive material coplanar with the contact and electrically connecting the bottom electrode to the second source/drain region.
19. The semiconductor device of claim 18 , wherein the transistor includes a gate electrode, and wherein the bottom electrode and the gate electrode are coplanar along a plane parallel to a top surface of the semiconductor substrate.
20. The semiconductor device of claim 18 , wherein the contact extends to a first metal layer and the conductive material includes a vertically extending portion of conductive material coplanar with the contact and having a first portion of a bottom surface interfacing the gate electrode and a second portion of the bottom surface interfacing the second source/drain region.