Photoimageable compositions containing photobase generators
Embodiments in accordance with the present invention encompass negative-tone, solvent developable, self-imageable polymer compositions containing photobase generators which are useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays.
1. A photoimageable solvent developable negative tone composition comprising:
a) a polymer selected from the group consisting of:
a copolymer containing repeating units derived from 5-phenethylbicyclo[2.2.1]hept-2-ene (PENB) and 2-(6-(bicyclo[2.2.1]hept-5-en-2-yl)hexyl)oxirane (EONB);
a copolymer containing repeating units derived from 5-phenethylbicyclo[2.2.1]hept-2-ene (PENB) and 2-(4-(bicyclo[2.2.1]hept-5-en-2-yl)butyl)oxirane (EHNB);
a copolymer containing repeating units derived from 5-benzylbicyclo[2.2.1]hept-2-ene (BenNB) and 2-(6-(bicyclo[2.2.1]hept-5-en-2-yl)hexyl)oxirane (EONB); and
a copolymer containing repeating units derived from 5-benzylbicyclo[2.2.1]hept-2-ene (BenNB) and 2-(4-(bicyclo[2.2.1]hept-5-en-2-yl)butyl)oxirane (EHNB);
b) a photobase generator of formula (II):
where R 3 is (C 6 -C 10 )aryl(C 1 -C 6 )alkyl; and
c) a carrier solvent.
2. The composition of claim 1 , wherein the polymer is selected from the group consisting of:
a copolymer containing repeating units derived from 5-phenethylbicyclo[2.2.1]hept-2-ene (PENB) and 2-(6-(bicyclo[2.2.1]hept-5-en-2-yl)hexyl)oxirane (EONB); and
a copolymer containing repeating units derived from 5-phenethylbicyclo[2.2.1]hept-2-ene (PENB) and 2-(4-(bicyclo[2.2.1]hept-5-en-2-yl)butyl)oxirane (EHNB).
3. The composition of claim 1 , wherein the polymer is selected from the group consisting of:
a copolymer containing repeating units derived from 5-phenethylbicyclo[2.2.1]hept-2-ene (PENB) and 2-(6-(bicyclo[2.2.1]hept-5-en-2-yl)hexyl)oxirane (EONB);
a copolymer containing repeating units derived from 5-phenethylbicyclo[2.2.1]hept-2-ene (PENB) and 2-(4-(bicyclo[2.2.1]hept-5-en-2-yl)butyl)oxirane (EHNB); and
a copolymer containing repeating units derived from 5-benzylbicyclo[2.2.1]hept-2-ene (BenNB) and 2-(4-(bicyclo[2.2.1]hept-5-en-2-yl)butyl)oxirane (EHNB).
4. The composition of claim 1 , wherein the photobase generator is 1-(1-phenylethyl)octahydropyrrolo[1,2-a]pyrimidine.
5. A photoimageable solvent developable negative tone composition comprising:
a) a copolymer containing repeating units derived from 5-phenethylbicyclo[2.2.1]hept-2-ene (PENB) and 2-(6-(bicyclo[2.2.1]hept-5-en-2-yl)hexyl)oxirane (EONB);
b)1-(1-phenylethyl)octahydropyrrolo[1,2-a]pyrimidine; and
c) a carrier solvent.