Integrated multi-terminal devices consisting of carbon nanotube, few-layer graphene nanogaps and few-layer graphene nanoribbons having crystallographically controlled interfaces
View Patent ↗The present invention relates to atomically-thin channel materials with crystallographically uniform interfaces to atomically-thin commensurate graphene electrodes and/or nanoribbons separated by nanogaps that allow for nanoelectronics based on quantum transport effects and having significantly improved contact resistances.
1. A multi-terminal device, comprising a substrate with an atomically-thin source electrode and an atomically-thin drain electrode both on a top surface thereof, wherein the source electrode and the drain electrode are separated by a nanogap of between 0.1 and 100 nm and commensurate with each other, and at least one atomically-thin channel material with a uniform crystallographic orientation to at least one commensurate electrode, wherein the atomically-thin channel material is deposited on top of the source and drain electrodes and bridges over the nanogap to form a device architecture, wherein a first overlap between the atomically-thin channel and the source electrode and a second overlap between the atomically-thin channel and the drain electrode provide uniform electrical interfaces.
2. The multi-terminal device of claim 1 , wherein the channel material has the same uniform crystallographic orientation to multiple commensurate electrodes.
3. The multi-terminal device of claim 1 , wherein the channel material is perpendicular to the nanogap.
4. The multi-terminal device of claim 1 , wherein the channel material is selected from the group consisting of, for example, carbon nanotubes, graphene, MoS 2 , WSe 2 , transition metal dichalcogenides, and black phosphorous.
5. The multi-terminal device of claim 1 , wherein the channel material comprises a carbon nanotube or a nanotube constructed from another 2D material.
6. The multi-terminal device of claim 1 , wherein the channel material comprises at least two carbon nanotubes or two nanotubes constructed from another 2D material that bridge the nanogap.
7. The multi-terminal device of claim 6 , wherein at least two of the nanotubes are parallel to each other.
8. The multi-terminal device of claim 1 , wherein within the nanogap lies at least one graphene nanoribbon commensurate with the other nearby graphene.
9. The multi-terminal device of claim 8 , wherein the graphene nanoribbon functions as a gate.
10. The multi-terminal device of claim 8 , wherein the graphene nanoribbon functions as an ultrashort nanoscale electrode (of approximately 10 nm or smaller width).
11. The multi-terminal device of claim 1 , further comprising a dielectric layer between the device architecture and a conducting layer.
12. The multi-terminal device of claim 1 , wherein the nanogap is between 0.1 nm and 10 nm.
13. The multi-terminal device of claim 1 , wherein the nanogap is a crystallographically uniform channel between the graphene source electrode and the graphene drain electrode.
14. The multi-terminal device of claim 1 , wherein each material of the device architecture is atomically thin.
15. The multi-terminal device of claim 1 , wherein the source electrode is comprised of graphene.
16. The multi-terminal device of claim 1 , wherein the drain electrode is comprised of graphene.
17. A method of preparing a multi-terminal device, comprising:
providing a source electrode and a drain electrode on a substrate material that are separated by a nanogap, wherein the source electrode and the drain electrode are commensurate with each other; and,
depositing a channel material on the source electrode and the drain electrode that bridges over the nanogap, wherein the channel material crystallographically aligns with at least one electrode and further wherein a first overlap between the atomically-thin channel and the source electrode and a second overlap between the atomically-thin channel and the drain electrode provide uniform electrical interfaces.
18. The method of claim 17 , wherein the channel material comprises a carbon nanotube or other atomically-thin material.
19. The method of claim 17 , wherein the other atomically thin material is selected from the group consisting of transition metal dichalcogenides, black phosphorous, and nanotubes formed from laminar materials.
20. The method of claim 17 , wherein the source electrode is comprised of graphene.
21. The method of claim 17 , wherein the drain electrode is comprised of graphene.
22. The method of claim 17 , wherein the nanogap provides a crystallographically and spatially uniform channel between the graphene source electrode and the graphene drain electrode.