IP Library Granted Patent US 9,929,237
Granted Patent B2
US 9,929,237 · App. 14/924,084 · Granted Mar 27, 2018

Method for manufacturing graphine film electronic device

Inventors: Junichi Yamaguchi (Atsugi, JP); Shintaro Sato (Atsugi, JP); Hiroko Yamada (Ikoma, JP); Kazuki Tanaka (Ikoma, JP)
Assignee: FUJITSU LIMITED
H01L29/1606C01B32/182C01B32/186H01L21/0242H01L21/0262H01L21/02491H01L21/02513H01L21/02516H01L21/02527H01L21/02603H01L21/02645H01L29/04H01L29/0665H01L29/66742H01L29/78603H01L29/78684H01L29/78696C01B2204/06C01B2204/22H01L23/53276H01L2924/0002
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Quick Facts
Patent No.
US 9,929,237
App. No.
14/924,084
Granted
Mar 27, 2018
Kind
B2
Abstract

A GNR is a ribbon-shaped graphene film which includes: five or more (for example, five, seven, or nine) six-membered rings of carbon atoms which are bonded and arranged in line in a short side direction; and a complete armchair type edge structure along a long side direction. By such a constitution, without using a transfer method, there are materialized a highly reliable graphene film which has an armchair type edge structure with a uniform width at a desired value and which enables an electric current on-off ratio of 10 5 or more that is practically sufficient for exhibiting a desired band gap.

Claims (10)

1. A method for manufacturing an electronic device, the method comprising:

forming a thin metal wire on an insulating material;

by a thermal conversion type precursor method with using a pentacene dimer precursor in which a Br group is introduced to each one side of a benzene rings in a center of two pentacene skeletal structures, or by a thermal conversion type precursor method and a photo conversion type precursor method with using a pentacene dimer precursor in which Br groups respectively introduced to both sides of a benzene ring in a center of one pentacene skeletal structure or a nonacene precursor, forming a ribbon-shaped graphene film that has five or more six-membered rings of carbon atoms which are bonded and arranged in line in a short side direction and an armchair type edge structure along a long side direction, on the thin metal wire; and

removing the thin metal wire.

2. The method for manufacturing the electronic device according to claim 1 ,

wherein in the graphene film a width of a portion where the five or more six-membered rings of carbon atoms are bonded and arranged in line in the short side direction is 1.2 nm or more.

3. The method for manufacturing the electronic device according to claim 1 ,

wherein the insulating material is a substrate of an insulating crystal.

4. The method for manufacturing the electronic device according to claim 1 ,

wherein the thin metal wire is formed of at least one kind selected from Au, Ag, Cu, Co, Ni, Pd, Ir, and Pt.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 2, 2015
From: YAMAGUCHI, JUNICHI; SATO, SHINTARO; YAMADA, HIROKO; TANAKA, KAZUKI
To: FUJITSU LIMITED
Reel/Frame 037196/0363 →
Priority Claims (1)
JP 2013-096591 · May 1, 2013 · national
Continuity (2)
Continuation PCTJP2014052864 · Feb 7, 2014
Related Publication 20160056240A1 · Feb 25, 2016