Deposition apparatus
A deposition apparatus including a crucible to receive the deposition material and in which a deposition material is evaporated; a linear deposition source having a sprayer to spray the evaporated deposition material; a first connection portion and a second connection portion spaced apart from each other by a predetermined interval, the first connection portion and the second connection portion connecting the linear deposition source to the crucible at an upper surface of the crucible; and a heater in the crucible to apply heat to the deposition material, wherein the upper surface of the crucible has a first convex portion and a second convex portion successively formed between the first connection portion and the second connection portion.
1. A deposition apparatus, comprising:
a crucible to receive the deposition material and in which a deposition material is evaporated;
a linear deposition source having a sprayer to spray the evaporated deposition material;
a first connection portion and a second connection portion spaced apart from each other by a predetermined interval, the first connection portion and the second connection portion connecting the linear deposition source to the crucible at an upper surface of the crucible; and
a heater in the crucible to apply heat to the deposition material,
wherein the upper surface of the crucible has a first convex portion and a second convex portion successively formed between the first connection portion and the second connection portion, and
wherein:
the heater includes a plurality of first heaters and a plurality of second heaters,
the plurality of first heaters extend in one direction and are arranged next to each other to be separated from each other by a predetermined pitch, and
the plurality of second heaters extend in a direction perpendicular to the one direction and are arranged next to each other to be separated from each other by a predetermined pitch.
2. The apparatus as claimed in claim 1 , wherein:
the crucible extends lengthwise in one direction, and
the first convex portion and the second convex portion each include:
a first inclination portion inclined at a first angle with respect to the one direction, and
a second inclination portion inclined at a second angle with respect to the one direction.
3. The apparatus as claimed in claim 1 , wherein the crucible includes a first joining portion that connects the first convex portion with the second convex portion, the first joining portion having a curved shape.
4. The apparatus as claimed in claim 2 , wherein the crucible includes a second joining portion that connects the first inclination portion with the second inclination portion, the second joining portion having a curved shape.
5. The apparatus as claimed in claim 1 , further comprising:
a temperature detector in the crucible; and
a temperature controller to transmit a temperature control signal to a power source that supplies power to the heater according to temperature of the crucible detected by the temperature detector.
6. The apparatus as claimed in claim 1 , further comprising a transfer portion to move the linear deposition source and the crucible in a first direction.
7. The apparatus as claimed in claim 6 , wherein a substrate onto which the deposition material is sprayed from the linear deposition source has a large size.