Electrowetting display device and manufacturing method thereof
An electrowetting display device and manufacturing method thereof. The manufacturing method comprises forming pixel electrodes on a substrate, forming an insulation layer on the pixel electrodes, applying light through a mask to expose portions of the insulation layer, developing the insulation layer to at least partially remove the exposed portions of the insulation layer, wherein the developing forms a water repellent layer on the pixel electrodes and partitioning walls on the water repellent layer, and forming an oil layer between the partitioning walls and on the water repellent layer. The water repellent layer and the sides of the partitioning walls are hydrophobic. Upper surfaces of the partitioning walls are hydrophilic. The partition walls are thicker than the water repellent layer.
1. A method for manufacturing an electrowetting display device, the method comprising:
forming pixel electrodes on a substrate;
forming a photo-resistive insulation layer on the pixel electrodes;
applying light through a mask to expose portions of the photo-resistive insulation layer;
applying an oxygen plasma treatment to an upper surface of the photo-resistive insulation layer to cause the upper surface of the photo-resistive insulation layer to become hydrophilic;
after applying the oxygen plasma treatment, developing the photo-resistive insulation layer to at least partially remove the portions of the photo-resistive insulation layer exposed by the applying light through the mask, wherein the developing forms;
a first remaining portion of the photo-resistive insulation layer as at least part of a water repellent layer on the pixel electrodes, and
a second remaining portion of the photo-resistive insulation layer as at least part of partitioning walls on the water repellent layer,
wherein the water repellent layer and sides of the partitioning walls are hydrophobic, wherein upper surfaces of the partitioning walls are hydrophilic, and wherein the partitioning walls are thicker than the water repellent layer; and
forming an oil layer between the partitioning walls and on the water repellent layer.
2. The method of claim 1 , wherein, before the applying the oxygen plasma treatment, the photo-resistive insulation layer comprises a material that turns from a hydrophobic material to a hydrophilic material according to the oxygen plasma treatment.
3. The method of claim 2 , wherein the photo-resistive insulation layer comprises SU 8.
4. The method of claim 1 , wherein the water repellent layer is formed during forming of the partitioning walls.
5. The method of claim 1 , wherein the mask is one or more of a half-tone mask or a slit mask.
6. The method of claim 5 , wherein:
the electrowetting display device comprises a display area and a pad area, and the display area comprises a plurality of pixel areas;
the mask comprises a transparent portion, a translucent portion, and an opaque portion;
the transparent portion corresponds to the pad area;
the translucent portion corresponds to the pixel areas; and
the opaque portion corresponds to boundaries of the pixel areas.
7. The method of claim 6 , wherein forming the pixel electrodes further comprises:
forming auxiliary electrodes for pads in the pad area on the substrate; and
forming the pixel electrodes in the display area on the substrate.
8. The method of claim 7 , comprising removing the photo-resistive insulation layer on the pad area to expose the auxiliary electrodes for the pads.
9. The method of claim 1 , wherein the forming the pixel electrodes further comprises:
forming a protective layer on the pixel electrodes.
10. The method of claim 1 , wherein the oil layer is a black oil layer.
11. An electrowetting display device, comprising:
a substrate;
pixel electrodes on the substrate;
a water repellent layer on the pixel electrodes;
a first partitioning wall having a hydrophobic vertical surface and an oxygen plasma treated top, horizontal portion that is hydrophilic and that has a thickness based on the oxygen plasma treatment, the first partitioning wall on the water repellent layer;
a second partitioning wall that is adjacent to the first partitioning wall; and
an oil layer between the first partitioning wall and the second partitioning wall and on the water repellent layer, wherein:
a photo-resist layer comprises the water repellent layer and the first partitioning wall,
the water repellent layer is hydrophobic, and
the first partitioning wall is thicker than the water repellent layer.
12. The electrowetting display device of claim 11 , wherein the water repellent layer and the first partitioning wall comprise a material that has turned from a hydrophobic material to a hydrophilic material according to the oxygen plasma treatment.
13. The electrowetting display device of claim 12 , wherein the water repellent layer and first partitioning wall comprise SU-8.
14. The electrowetting display device of claim 11 , wherein the water repellent layer and the first partitioning wall are each part of an integral body.
15. The electrowetting display device of claim 11 , further comprising a protective layer between the pixel electrodes and the water repellent layer.
16. The electrowetting display device of claim 11 , wherein the oil layer is a black oil layer.
17. The electrowetting display device of claim 11 , comprising:
a display area comprising the pixel electrodes; and
a pad area comprising auxiliary electrodes for pads.