Granted Patent
S1
US 1,005,245 · App. 29/789,775 · Granted Nov 21, 2023
Electrode cover for a plasma processing apparatus
Inventors:
Shintarou Nakatani (Tokyo, JP); Takamasa Ichino (Tokyo, JP); Kazunori Nakamoto (Tokyo, JP); Yuki Tanaka (Tokyo, JP)
Assignee:
Hitachi High-Tech Corporation
View Patent ↗
Loading inventors, assignments & file history…
Claims (1)
The ornamental design for an electrode cover for a plasma processing apparatus, as shown and described.
Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Feb 7, 2022
From: NAKATANI, SHINTAROU; ICHINO, TAKAMASA; NAKAMOTO, KAZUNORI; TANAKA, YUKI
To: HITACHI HIGH-TECH CORPORATION
Reel/Frame 058907/0204 →
Priority Claims (1)
JP 2021-008306 D
· Apr 19, 2021
· national