Polishing pad and method for producing polishing pad
Provided are a method for producing a finish polishing pad and the polishing pad which allow formation of a stable film and enables polishing with fewer polishing scratches. The method includes the steps of: dissolving a composition for forming polyurethane resin film containing a polyurethane resin and an additive(s) in a solvent capable of dissolving the resin; removing an insoluble component(s) to make the content of the insoluble component(s) in the solution less than 1% by mass relative to the total mass of the composition; adding a poor solvent to the solution from which the insoluble component(s) has(have) been removed, followed by mixing, the amount of the poor solvent added being calculated according to a defined Formula 1; and forming a film from the mixture solution on the film formation substrate by a wet coagulation method, to thereby form the polyurethane resin film.
1. A method for producing a polishing pad comprising a film formation substrate, and a polyurethane resin film as a polishing layer on the film formation substrate, the method comprising the steps of:
dissolving a composition for forming polyurethane resin film containing a polyurethane resin and an additive in a solvent capable of dissolving the resin;
removing an insoluble component to make the content of the insoluble component in the solution less than 1% by mass relative to the total mass of solid content in the composition for forming polyurethane resin film;
adding a poor solvent to the solution from which the insoluble component has been removed, followed by mixing, the amount of the poor solvent in terms of ml to be added per gram of the solid content mass of the resin being calculated according to Formula 1: the amount (ml)=a coagulation value (ml) of the polyurethane resin determined by using the poor solvent×A, wherein A is within 0.007 to 0.027; and
forming a film from the mixture solution on the film formation substrate by a wet coagulation method, to thereby form the polyurethane resin film,
wherein the poor solvent is water,
wherein the polyurethane resin has a resin modulus of 1 to 20 MPa, and
wherein the method is free of a foam-controlling auxiliary agent and a film formation-stabilizing auxiliary agent.
2. The production method according to claim 1 , wherein the solvent capable of dissolving the polyurethane resin is a water-miscible organic solvent.
3. A polishing pad comprising:
a film formation substrate; and
a polyurethane resin film formed on the film formation substrate by a wet coagulation method as a polishing layer, wherein
the content of a component which is insoluble when the polyurethane resin film is dissolved in a solvent capable of dissolving a polyurethane resin forming the film is less than 1% by mass relative to a dry mass of the polyurethane resin film,
the polyurethane resin has a coagulation value, which has been determined by using water as a poor solvent, in a range from 8 ml to 20 ml, and
the number of foamed cells on a top surface of the polishing layer made of the polyurethane resin film is 100 cells/mm 2 to 270 cells/mm 2 ,
wherein the polyurethane resin has a resin modulus of 1 to 20 MPa, and
wherein the polishing pad is free of a foam-controlling auxiliary agent and a film formation-stabilizing auxiliary agent.
4. The production method according to claim 1 , wherein the polyurethane resin has a coagulation value, which has been determined by using the poor solvent, in a range from 8 ml to 20 ml.
5. The polishing pad according to claim 3 , wherein
an average pore diameter on a top surface of the polishing layer made of the polyurethane resin film is 30 μm or more.
6. The production method according to claim 2 , wherein the polyurethane resin has a coagulation value, which has been determined by using water as a poor solvent, in a range from 8 ml to 20 ml.
7. The method according to claim 4 , wherein
an average pore diameter on a top surface of the polishing layer made of the polyurethane resin film is 30 μm or more.
8. The method according to claim 6 , wherein
an average pore diameter on a top surface of the polishing layer made of the polyurethane resin film is 30 μm or more.
9. The method according to claim 1 , wherein the polishing pad consists of the film formation substrate, and the polyurethane resin film as the polishing layer on the film formation substrate.
10. The method according to claim 9 , wherein the film formation substrate is a polyester film.
11. The method according to claim 1 , wherein the polyurethane resin has a coagulation value, which has been determined by using the poor solvent, in a range from 8 ml to 20 ml, the method further comprises subjecting the polyurethane resin film to an embossing treatment, and the polyurethane resin film has a flow beginning temperature of 220° C. or below.
12. The method according to claim 11 , comprising subjecting the polyurethane resin film to an embossing treatment, wherein the polyurethane resin has a flow beginning temperature of 150° C. to 220° C.
13. The method according to claim 1 , wherein the polyurethane resin has a resin modulus of 3 to 10 mpa.
14. The polishing pad according to claim 3 , wherein the polyurethane resin film has been subjected to an embossing treatment, and the polyurethane resin has a flow beginning temperature of 220° C. or below.
15. The polishing pad according to claim 3 , wherein the polyurethane resin film has been subjected to an embossing treatment, and the polyurethane resin has a flow beginning temperature of 150° C. to 220° C.
16. The polishing pad according to claim 3 , wherein a Shore A hardness of the polyurethane resin film is 10° to 400.
17. The polishing pad according to claim 3 , wherein the polyurethane resin film has a pore area ratio of from 5% to 30%.
18. The polishing pad according to claim 3 , wherein an average pore diameter on a top surface of the polishing layer made of the polyurethane resin film is in a range from 35 μm to 50 μm.