Aqueous solution and process for removing substances from substrates
The disclosure is directed solutions and processes to remove substances from substrates. In some cases, the substances can include photoresist on semiconductor wafers. The solution can include a quaternary ammonium hydroxide an amine, and optionally a corrosion inhibitor and/or a sugar alcohol. One or more sides of the substrate can be contacted with the solution to remove one or more substances from the substrate.
1. A photoresist cleaning solution consisting of:
a tetra-alkyl substituted ammonium hydroxide selected from the group consisting of tetramethylammonium hydroxide, tetraethylammonium hydroxide, dimethyldipropylammonium hydroxide, ethyltrimethylammonium hydroxide and a combination of at least two thereof;
an amine selected from the group consisting of monoethanolamine, 1,8 diazabicyclo[5.4.0]undec-7 -ene, tetraethylenepentamine, and a combination of at least two thereof;
at least one of a C 4 -C 14 dibasic acid or an amine salt thereof; and
water.
2. The solution of claim 1 wherein said C 4 -C 14 dibasic acid is selected from the group consisting of dodecanedioic acid, sebacic acid, and undecanedioic acid.
3. The solution of claim 1 further consisting of a sugar alcohol.
4. The solution of claim 3 wherein said sugar alcohol is selected from the group consisting of glycerin, sorbitol, and xylitol.
5. A photoresist cleaning solution consisting of:
a tetra-alkyl substituted ammonium hydroxide selected from the group consisting of tetramethylammonium hydroxide, tetraethylammonium hydroxide, dimethyldipropylammonium hydroxide, ethyltrimethylammonium hydroxide, and a combination of at least two thereof in an amount of from about 1% by weight to about 8% by weight of a total weight of the solution;
an amine selected from the group consisting of monoethanolamine, tetraethylenepentamine, 1,8- diazabicyclo[5.4.0]undec-7-ene, and a combination of at least two thereof, in an amount of from about 0.8% by weight to about 10% by weight of the total weight of the solution;
at least one of a C 4 -C 14 dibasic acid or an amine salt thereof in an amount of from about 0.1% by weight to about 9% by weight of the total weight of the solution;
a sugar alcohol in an amount of less than about 15% by weight of the total weight of the solution;
and the balance to 100 weight percent water.
6. The solution of claim 5 wherein said sugar alcohol is selected from the group consisting of glycerin, sorbitol, and xylitol.
7. The solution of claim 5 wherein said and C 4 -C 14 dibasic acids are selected from the group consisting of dodecanedioic acid, sebacic acid, and undecanedioic acid.
8. A photoresist cleaning solution consisting of:
from about 3% by weight to about 5% by weight of a total weight of the solution of a tetra-alkyl substituted ammonium hydroxide selected from the group consisting of tetramethylammonium hydroxide, tetraethylammonium hydroxide, and a combination thereof;
from about 2% by weight to about 4% by weight of the total weight of the solution of an amine selected from the group consisting of monoethanolamine, tetraethylenepentamine, 1,8-diazabicyclo[5.4.0]undec-7-ene, and a combination of at least two;
from about 0.1% by weight to about 2% by weight of the total weight of the solution of a dibasic acid or an amine salt there of selected from the group consisting of dodecanedioic acid, sebacic acid, undecanedioic acid, and a mixture thereof; and
the balance to 100 weight percent water.
9. The solution of claim 8 further consisting of about 1% by weight to about 3% by weight of the total solution of a sugar alcohol.
10. The solution of claim 9 wherein sugar alcohol is selected from the group consisting of glycerin, sorbitol, and xylitol.
11. The solution of claim 9 wherein sugar alcohol is glycerin.
12. A photoresist cleaning solution consisting of:
from about 1% by weight to about 5% by weight of a total weight of the solution of tetraethylammonium hydroxide;
from about 2% by weight to about 5% by weight of the total weight of the solution of monoethanolamine;
from about 0.1% by weight to about 2% by weight of the total weight of the solution of dodecanedioic acid, sebacic acid, or undecanedioic acid, a combination thereof or the amine salts thereof;
from about 0.1% by weight to about 2% by weight of the total weight of the solution of a sugar alcohol;
and the balance to 100 weight percent water.
13. The solution of claim 12 wherein said sugar alcohol is glycerin.
14. The solution of claim 12 wherein:
said tetraethylammonium hydroxide is present in an amount of from about 2% by weight to about 5% by weight of a total weight of the solution;
said monoethanolamine is present in an amount of from about 2% by weight to about 4% by weight of the total weight of the solution;
said sebacic acid or the amine salt thereof is present in an amount of from about 0.1% by weight to about 1% by weight of the total weight of the solution;
said sugar alcohol is glycerin present in an amount of from about 0.1% by weight to about 2% by weight of the total weight of the solution;
and the balance to 100 weight percent water.