Phase difference detection in pixels
The present disclosure relates to a solid-state imaging device that can perform phase difference detection at a high sensitivity even in fine pixels, and an electronic apparatus. Pixels of the solid-state imaging device share one on-chip lens, and the pixels each have an in-layer lens below the on-chip lens. The present disclosure can be applied to various kinds of electronic apparatuses, such as solid-state imaging devices, imaging apparatuses like digital still cameras and digital video cameras, portable telephone devices having imaging functions, and audio players having imaging functions.
1. A solid-state imaging device, comprising:
at least one on-chip lens; and
a plurality of pixels that share one on-chip lens of the at least one on-chip lens,
wherein each of the plurality of pixels has a respective in-layer lens of a plurality of in-layer lenses below the one on-chip lens, and
wherein the plurality of in-layer lenses are in planar positions deviated from center positions of the plurality of pixels.
2. The solid-state imaging device according to claim 1 , wherein the plurality of in-layer lenses are deviated in a direction away from a center position of the on-chip lens.
3. The solid-state imaging device according to claim 1 , wherein the plurality of in-layer lenses are made of a material having a first refractive index higher than a second refractive index of a layer that surrounds the plurality of in-layer lenses.
4. The solid-state imaging device according to claim 3 , wherein gravity centers of the plurality of in-layer lenses are in the planar positions deviated from center positions of the plurality of pixels.
5. The solid-state imaging device according to claim 4 , wherein based on a proportion of the material that is higher in a direction away from the center positions of the plurality of pixels, the gravity centers of the plurality of in-layer lenses are in the planar positions deviated from the center positions of the plurality of pixels.
6. The solid-state imaging device according to claim 3 , wherein a shape of each of the in-layer lenses is a ring-pattern shape that comprises ring-shaped members having the first refractive index, wherein the ring-shaped members are outside a circular cylindrical shape.
7. The solid-state imaging device according to claim 1 , wherein the plurality of in-layer lenses are one of below or above a color filter.
8. The solid-state imaging device according to claim 1 , wherein the plurality of in-layer lenses are connected to a protection film, wherein the protection film is a continuous film, and wherein each of the plurality of in-layer lenses comprises a same material as the protection film.
9. The solid-state imaging device according to claim 1 , wherein the plurality of pixels have waveguides below the plurality of in-layer lenses.
10. The solid-state imaging device according to claim 9 , wherein the plurality of pixels have photodiodes below the waveguides.
11. The solid-state imaging device according to claim 1 , wherein the plurality of pixels have a photoelectric conversion unit outside a semiconductor substrate.
12. The solid-state imaging device according to claim 1 , wherein
the plurality of pixels have a plurality of photoelectric conversion units, and
the plurality of photoelectric conversion units photoelectrically convert incident light of different wavelengths.
13. The solid-state imaging device according to claim 1 , wherein the on-chip lens and the plurality of in-layer lenses are in specific positions where exit pupil is corrected.
14. The solid-state imaging device according to claim 1 , wherein the one on-chip lens is shared between two pixels of the plurality of pixels or among four pixels of the plurality of pixels.
15. The solid-state imaging device according to claim 1 , wherein each of the plurality of pixels comprises a color filter of one of R, G, or B.
16. The solid-state imaging device according to claim 1 , wherein each of the plurality of pixels comprises a color filter of one of R, G, B, or W.
17. The solid-state imaging device according to claim 1 , wherein the plurality of pixels include a first pixel and a second pixel, wherein both of the first pixel and the second pixel comprise color filters of a same color, and
wherein an inclination of a first slope of the on-chip lens corresponding to the first pixel is opposite to an inclination of a second slope of the on-chip lens corresponding to the second pixel.
18. The solid-state imaging device according to claim 1 , wherein the plurality of pixels are in a two-dimensional array.
19. An electronic apparatus, comprising:
a solid-state imaging device including:
at least one on-chip lens; and
a plurality of pixels that share one on-chip lens of the at least one on-chip lens,
wherein each of the plurality of pixels has a respective in-layer lens of a plurality of in-layer lenses below the one on-chip lens, and
wherein the plurality of in-layer lenses are in planar positions deviated from center positions of the plurality of pixels.
20. A solid-state imaging device, comprising:
a first semiconductor region;
a second semiconductor region;
a first color filter above the first semiconductor region;
a second color filter above the second semiconductor region;
an on-chip lens above each of the first color filter and the second color filter;
a first lens between the first semiconductor region and the on-chip lens in a cross-sectional direction,
wherein a center of the first lens is deviated from a center of the first semiconductor region; and
a second lens between the second semiconductor region and the on-chip lens in the cross-sectional direction,
wherein a center of the second lens is deviated from a center of the second semiconductor region.
21. The solid-state imaging device according to claim 20 , wherein the first lens is between the first color filter and the first semiconductor region in the cross-sectional direction.
22. The solid-state imaging device according to claim 21 , wherein the first lens is in an insulating layer.
23. The solid-state imaging device according to claim 20 , wherein the first lens is between the first color filter and the on-chip lens in the cross-sectional direction.
24. The solid-state imaging device according to claim 20 , wherein the center of the first lens is deviated from a center of the first color filter.