Liquid discharge head and method for manufacturing same
A liquid discharge head includes an element substrate, a liquid supply substrate, a photosensitive resin layer with which the element substrate and the liquid supply substrate are adhered, and a liquid inflow through-hole penetrating the element substrate, the photosensitive resin layer, and the liquid supply substrate. The element substrate includes a pressure chamber including a discharge opening that discharges liquid, a liquid supply passage, in which one end is connected to the pressure chamber and another end is connected to the liquid inflow through-hole, the liquid supply passage supplying the liquid supplied from the liquid inflow through-hole to the pressure chamber, a diaphragm that forms a surface that opposes the discharge opening of the pressure chamber, a piezoelectric transducer that applies vibration to the diaphragm, and a partition portion, in which one surface opposes the liquid supply passage and another surface opposes the photosensitive resin layer through the diaphragm.
1. A liquid discharge head, comprising:
an element substrate;
a liquid supply substrate that is stacked on the element substrate;
a photosensitive resin layer disposed between the element substrate and the liquid supply substrate; and
a liquid inflow through-hole that penetrates the element substrate, the photosensitive resin layer, and the liquid supply substrate, wherein
the element substrate includes,
a pressure chamber that includes a discharge opening that discharges liquid,
a liquid supply passage, one end of which is connected to the pressure chamber and another end of which is connected to the liquid inflow through-hole, the liquid supply passage supplying the liquid supplied from the liquid inflow through-hole to the pressure chamber,
a diaphragm that forms a surface that opposes the discharge opening of the pressure chamber,
a piezoelectric transducer that applies vibration to the diaphragm and is provided inside the photosensitive resin layer, and
a partition portion, one surface of which opposes the liquid supply passage and another surface of which opposes the photosensitive resin layer through the diaphragm, and
a liquid outflow through-hole that penetrates the element substrate, the photosensitive resin layer, and the liquid supply substrate, wherein
the element substrate includes
a liquid collection passage, one end of which is connected to the pressure chamber and another end of which is connected to the liquid outflow through-hole, the liquid collection passage making the liquid that has flowed in from the pressure chamber to flow out to the liquid outflow through-hole, and
a second partition portion, one surface of which opposes the liquid collection passage and another surface of which opposes the photosensitive resin layer through the diaphragm,
wherein the liquid inflow through-hole, the liquid supply passage, the pressure chamber, the liquid collection passage and the liquid outflow through-hole are provided consecutively in this order.
2. The liquid discharge head according to claim 1 , wherein the partition portion is formed of silicon.
3. The liquid discharge head according to claim 1 , wherein the second partition portion is formed of silicon.
4. The liquid discharge head according to claim 1 , wherein the partition portion is longer than the liquid supply passage in a supply direction of the liquid.
5. The liquid discharge head according to claim 1 , wherein the second partition portion is longer than the liquid collection passage in a supply direction of the liquid.