IP Library Granted Patent US 10,103,321
Granted Patent B2
US 10,103,321 · App. 15/259,525 · Granted Oct 16, 2018

Magnetoresistive element and magnetic memory

Inventors: Yushi Kato (Chofu, JP); Tadaomi Daibou (Yokohama, JP); Qinli Ma (Sendai, JP); Atsushi Sugihara (Sendai, JP); Shigemi Mizukami (Sendai, JP); Terunobu Miyazaki (Sendai, JP)
Assignees: KABUSHIKI KAISHA TOSHIBA; TOHOKU UNIVERSITY
H01L43/08G11C11/161G11C11/1673G11C11/1675H01F10/3295H01L27/228H01L43/02H01L43/10H01F10/3254H01F10/3286
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Quick Facts
Patent No.
US 10,103,321
App. No.
15/259,525
Granted
Oct 16, 2018
Kind
B2
Abstract

A magnetoresistive element according to an embodiment includes: a first magnetic layer; a second magnetic layer; a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer; and a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer, the first magnetic layer containing Mn and at least one of Ge, Ga, or Al, and the third magnetic layer containing Mn 2 VZ, where V represents vanadium, and Z represents at least one element of Al or Ga.

Claims (50)

1. A magnetoresistive element comprising:

a first magnetic layer;

a second magnetic layer;

a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer; and

a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer,

the first magnetic layer containing Mn and at least one of Ge, Ga, or Al, and the third magnetic layer containing Mn 2 V(Al 1-x Ga x )(0<x≤1).

2. The element according to claim 1 , wherein the third magnetic layer further contains at least one of Co, Fe, Cu, Rh, or Ru.

3. The element according to claim 1 , wherein the third magnetic layer has a thickness of 1.5 nm to 5 nm.

4. The element according to claim 1 , wherein the first magnetic layer contains Mn, Ga, and at least one of Al, Ge, Cr, Co, Pt, Ir, Ru, Pd, Rh, Ni, Fe, Re, Au, Cu, B, C, P, Gd, Tb, or Dy.

5. The element according to claim 1 , further comprising a second nonmagnetic layer disposed between the first magnetic layer and the third magnetic layer, the second nonmagnetic layer containing at least one of Mg, Ba, Ca, Sr, Sc, Y, Nb, Gd, Tb, Dy, Ce, Ho, Yb, Er, B, C, or N.

6. A magnetoresistive element comprising:

a first magnetic layer;

a second magnetic layer;

a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer; and

a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer,

the first magnetic layer containing Mn and at least one of Ge, Ga, or Al, and the third magnetic layer containing Ru 2 FeGe or Rh 2 CoZ, where Z represents at least one element of Sn or Sb.

7. The element according to claim 6 , wherein the third magnetic layer has a thickness of 1.5 nm to 5 nm.

8. The element according to claim 6 , wherein the first magnetic layer contains Mn, Ga, and at least one of Al, Ge, Cr, Co, Pt, Ir, Ru, Pd, Rh, Ni, Fe, Re, Au, Cu, B, C, P, Gd, Tb, or Dy.

9. The element according to claim 6 , further comprising a second nonmagnetic layer disposed between the first magnetic layer and the third magnetic layer, the second nonmagnetic layer containing at least one of Mg, Ba, Ca, Sr, Sc, Y, Nb, Gd, Tb, Dy, Ce, Ho, Yb, Er, B, C, or N.

10. A magnetoresistive element comprising:

a first magnetic layer;

a second magnetic layer;

a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer; and

a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer,

the first magnetic layer containing Mn and at least one of Ge, Ga, or Al, and the third magnetic layer containing Co 2 YZ and at least one of Cu, Rh, Ru, Ti, V, or Nb, where Y represents at least one element of Fe or Mn, and Z represents at least one element of Al, Si, Ga, Ge, or Sn.

11. The element according to claim 10 , wherein the third magnetic layer has a thickness of 1.5 nm to 5 nm.

12. The element according to claim 10 , wherein the first magnetic layer contains Mn, Ga, and at least one of Al, Ge, Cr, Co, Pt, Ir, Ru, Pd, Rh, Ni, Fe, Re, Au, Cu, B, C, P, Gd, Tb, or Dy.

13. The element according to claim 10 , further comprising a second nonmagnetic layer disposed between the first magnetic layer and the third magnetic layer, the second nonmagnetic layer containing at least one of Mg, Ba, Ca, Sr, Sc, Y, Nb, Gd, Tb, Dy, Ce, Ho, Yb, Er, B, C, or N.

14. A magnetoresistive element comprising:

a first magnetic layer;

a second magnetic layer;

a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer; and

a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer,

the first magnetic layer containing Mn and at least one of Ge, Ga, or Al, and the third magnetic layer containing Mn 2 YZ, where Y represents at least one element of Ru, Cr, or Co, and Z represents at least one element of Al, Ga, or Ge.

15. The element according to claim 14 , wherein the third magnetic layer has a thickness of 1.5 nm to 5 nm.

16. The element according to claim 14 , wherein the first magnetic layer contains Mn, Ga, and at least one of Al, Ge, Cr, Co, Pt, Ir, Ru, Pd, Rh, Ni, Fe, Re, Au, Cu, B, C, P, Gd, Tb, or Dy.

17. The element according to claim 14 , further comprising a second nonmagnetic layer disposed between the first magnetic layer and the third magnetic layer, the second nonmagnetic layer containing at least one of Mg, Ba, Ca, Sr, Sc, Y, Nb, Gd, Tb, Dy, Ce, Ho, Yb, Er, B, C, or N.

18. A magnetic memory comprising:

the magnetoresistive element according to claim 1 ;

a first wiring electrically connected to the first magnetic layer of the magnetoresistive element; and

a second wiring electrically connected to the second magnetic layer of the magnetoresistive element.

19. A magnetoresistive element comprising:

a first magnetic layer;

a second magnetic layer;

a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer; and

a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer,

the first magnetic layer containing Mn and at least one of Ge, Ga, or Al, the third magnetic layer containing Mn 2 VZ, where V represents vanadium, and Z represents at least one element of Al or Ga, and the third magnetic layer having a magnetization along a c-axis perpendicular to a film plane.

20. The element according to claim 19 , wherein the third magnetic layer further contains at least one of Co, Fe, Cu, Rh, or Ru.

21. The element according to claim 19 , wherein the third magnetic layer has a thickness of 1.5 nm to 5 nm.

22. The element according to claim 19 , wherein the first magnetic layer contains Mn, Ga, and at least one of Al, Ge, Cr, Co, Pt, Ir, Ru, Pd, Rh, Ni, Fe, Re, Au, Cu, B, C, P, Gd, Tb, or Dy.

Assignments (5)
CHANGE OF NAME AND ADDRESS Recorded Jan 17, 2020
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 051628/0669 →
CHANGE OF NAME AND ADDRESS Recorded Jan 16, 2020
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 052001/0303 →
MERGER Recorded Jan 15, 2020
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 051524/0444 →
DEMERGER Recorded Jan 10, 2020
From: KABUSHIKI KAISHA TOSHBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 051561/0839 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 19, 2017
From: KATO, YUSHI; DAIBOU, TADAOMI; MA, QINLI; SUGIHARA, ATSUSHI; MIZUKAMI, SHIGEMI; MIYAZAKI, TERUNOBU
To: KABUSHIKI KAISHA TOSHIBA; TOHOKU UNIVERSITY
Reel/Frame 042056/0177 →
Priority Claims (1)
JP 2014-050858 · Mar 13, 2014 · national
Continuity (2)
Continuation PCTJP2015053197 · Feb 5, 2015
Related Publication 20160380185A1 · Dec 29, 2016