Chemical modification of hardmask films for enhanced etching and selective removal
Embodiments include a method of processing a hardmask that includes forming an alloyed carbon hardmask over an underlying layer. In an embodiment, the alloyed carbon hardmask is alloyed with metallic-carbon fillers. The embodiment further includes patterning the alloyed carbon hardmask and transferring the pattern of the alloyed carbon hardmask into the underlying layer. According to an embodiment, the method may further include removing the metallic component of the metallic-carbon fillers from the alloyed carbon hardmask to form a porous carbon hardmask. Thereafter, the porous hardmask may be removed. In an embodiment, the metallic component of the metallic-carbon fillers may include flowing a processing gas into a chamber that volatizes the metallic component of the metallic-carbon fillers.
1. A carbon-based hardmask layer, comprising:
a substrate; and
an amorphous carbon layer above the substrate, the amorphous carbon layer comprising carbon and hydrogen, and the amorphous carbon layer comprising a metallic filler bonded to the carbon, wherein a total atomic percentage of the hydrogen in the amorphous carbon layer is between 5% and 50%, and the total atomic percentage of the metallic filler in the amorphous carbon layer is between 5% and 90%.
2. The carbon-based hardmask layer of claim 1 , wherein the metallic filler is further bonded to the hydrogen.
3. The carbon-based hardmask layer of claim 1 , wherein the metallic filler further comprises metal-metal bonds.
4. The carbon-based hardmask layer of claim 1 , wherein the metallic filler is further bonded to the hydrogen, and wherein the metallic filler further comprises metal-metal bonds.
5. The carbon-based hardmask layer of claim 1 , wherein the metallic filler is a metallic component selected from the group consisting of W, V, Nb, Ta, Ti, Zr, Hf, and Al.
6. The carbon-based hardmask layer of claim 1 , wherein the metallic filler is boron.
7. The carbon-based hardmask layer of claim 6 , wherein the amorphous carbon layer comprises B4C.
8. A carbon-based hardmask layer, comprising:
a substrate; and
an amorphous carbide layer above the substrate, the amorphous carbide layer comprising carbon and hydrogen, and the amorphous carbide layer comprising a metallic filler bonded to the carbon, wherein a total atomic percentage of the hydrogen in the amorphous carbide layer is between 5% and 50%, and the total atomic percentage of the metallic filler in the amorphous carbide layer is between 5% and 90%.
9. The carbon-based hardmask layer of claim 8 , wherein the metallic filler is further bonded to the hydrogen.
10. The carbon-based hardmask layer of claim 8 , wherein the metallic filler further comprises metal-metal bonds.
11. The carbon-based hardmask layer of claim 8 , wherein the metallic filler is further bonded to the hydrogen, and wherein the metallic filler further comprises metal-metal bonds.
12. The carbon-based hardmask layer of claim 8 , wherein the metallic filler is a metallic component selected from the group consisting of W, V, Nb, Ta, Ti, Zr, Hf, and Al.
13. The carbon-based hardmask layer of claim 8 , wherein the metallic filler is boron.
14. The carbon-based hardmask layer of claim 13 , wherein the amorphous carbide layer comprises B4C.
15. A carbon-based hardmask layer, comprising:
a substrate; and
an amorphous carbon and carbide layer above the substrate, the amorphous carbon and carbide layer comprising carbon and hydrogen, and the amorphous carbon and carbide layer comprising a metallic filler bonded to the carbon, wherein a total atomic percentage of the hydrogen in the amorphous carbon and carbide layer is between 5% and 50%, and the total atomic percentage of the metallic filler in the amorphous carbon and carbide layer is between 5% and 90%.
16. The carbon-based hardmask layer of claim 15 , wherein the metallic filler is further bonded to the hydrogen.
17. The carbon-based hardmask layer of claim 15 , wherein the metallic filler further comprises metal-metal bonds.
18. The carbon-based hardmask layer of claim 15 , wherein the metallic filler is further bonded to the hydrogen, and wherein the metallic filler further comprises metal-metal bonds.
19. The carbon-based hardmask layer of claim 15 , wherein the metallic filler is a metallic component selected from the group consisting of W, V, Nb, Ta, Ti, Zr, Hf, and Al.
20. The carbon-based hardmask layer of claim 15 , wherein the metallic filler is boron, and wherein the amorphous carbon and carbide layer comprises B4C.